JPS6424861U - - Google Patents
Info
- Publication number
- JPS6424861U JPS6424861U JP11902287U JP11902287U JPS6424861U JP S6424861 U JPS6424861 U JP S6424861U JP 11902287 U JP11902287 U JP 11902287U JP 11902287 U JP11902287 U JP 11902287U JP S6424861 U JPS6424861 U JP S6424861U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- insulating film
- contact hole
- shot
- opening area
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 5
- 238000009413 insulation Methods 0.000 claims 1
Landscapes
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11902287U JPS6424861U (et) | 1987-08-03 | 1987-08-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11902287U JPS6424861U (et) | 1987-08-03 | 1987-08-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6424861U true JPS6424861U (et) | 1989-02-10 |
Family
ID=31363888
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11902287U Pending JPS6424861U (et) | 1987-08-03 | 1987-08-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6424861U (et) |
-
1987
- 1987-08-03 JP JP11902287U patent/JPS6424861U/ja active Pending