JPS6424861U - - Google Patents

Info

Publication number
JPS6424861U
JPS6424861U JP11902287U JP11902287U JPS6424861U JP S6424861 U JPS6424861 U JP S6424861U JP 11902287 U JP11902287 U JP 11902287U JP 11902287 U JP11902287 U JP 11902287U JP S6424861 U JPS6424861 U JP S6424861U
Authority
JP
Japan
Prior art keywords
semiconductor substrate
insulating film
contact hole
shot
opening area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11902287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11902287U priority Critical patent/JPS6424861U/ja
Publication of JPS6424861U publication Critical patent/JPS6424861U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
JP11902287U 1987-08-03 1987-08-03 Pending JPS6424861U (el)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11902287U JPS6424861U (el) 1987-08-03 1987-08-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11902287U JPS6424861U (el) 1987-08-03 1987-08-03

Publications (1)

Publication Number Publication Date
JPS6424861U true JPS6424861U (el) 1989-02-10

Family

ID=31363888

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11902287U Pending JPS6424861U (el) 1987-08-03 1987-08-03

Country Status (1)

Country Link
JP (1) JPS6424861U (el)

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