JPS6424832U - - Google Patents
Info
- Publication number
- JPS6424832U JPS6424832U JP11942787U JP11942787U JPS6424832U JP S6424832 U JPS6424832 U JP S6424832U JP 11942787 U JP11942787 U JP 11942787U JP 11942787 U JP11942787 U JP 11942787U JP S6424832 U JPS6424832 U JP S6424832U
- Authority
- JP
- Japan
- Prior art keywords
- passage
- top plate
- immersed
- wafer
- cleaning liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 6
- 238000004140 cleaning Methods 0.000 claims description 3
- 238000001035 drying Methods 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 4
- 238000007599 discharging Methods 0.000 claims 1
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11942787U JPS6424832U (lm) | 1987-08-04 | 1987-08-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11942787U JPS6424832U (lm) | 1987-08-04 | 1987-08-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6424832U true JPS6424832U (lm) | 1989-02-10 |
Family
ID=31364647
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11942787U Pending JPS6424832U (lm) | 1987-08-04 | 1987-08-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6424832U (lm) |
-
1987
- 1987-08-04 JP JP11942787U patent/JPS6424832U/ja active Pending