JPS642442U - - Google Patents
Info
- Publication number
- JPS642442U JPS642442U JP9579787U JP9579787U JPS642442U JP S642442 U JPS642442 U JP S642442U JP 9579787 U JP9579787 U JP 9579787U JP 9579787 U JP9579787 U JP 9579787U JP S642442 U JPS642442 U JP S642442U
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- robot
- wafers
- exhaust hole
- moves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 4
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9579787U JPS642442U (un) | 1987-06-22 | 1987-06-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9579787U JPS642442U (un) | 1987-06-22 | 1987-06-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS642442U true JPS642442U (un) | 1989-01-09 |
Family
ID=31320515
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9579787U Pending JPS642442U (un) | 1987-06-22 | 1987-06-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS642442U (un) |
-
1987
- 1987-06-22 JP JP9579787U patent/JPS642442U/ja active Pending