JPS6424351A - Self-diagonosis device of da converting output unit for electron beam device - Google Patents
Self-diagonosis device of da converting output unit for electron beam deviceInfo
- Publication number
- JPS6424351A JPS6424351A JP62178862A JP17886287A JPS6424351A JP S6424351 A JPS6424351 A JP S6424351A JP 62178862 A JP62178862 A JP 62178862A JP 17886287 A JP17886287 A JP 17886287A JP S6424351 A JPS6424351 A JP S6424351A
- Authority
- JP
- Japan
- Prior art keywords
- analog
- converting device
- electron beam
- comparison
- signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 title abstract 3
Abstract
PURPOSE:To make it possible to diagonose the trouble of a DA converting device in an electron beam device which is liable to receive the influence of a spiky noise and the like, automatically during the operation of the device, by diagonosing whether the DA converting device is operating normally or not through comparing the analog signal for comparison purpose and the analog DA output signal. CONSTITUTION:A digital control signal 10 from each control circuit is converted into an analog DA output signal 11 by a DA converting device 5, converted into an analog control signal 12 by a voltage follower circuit 6, and drives the deflecter of an electron beam device, a pulse generator, an energy analyzer, or the like. On the other hand, the digital control signal 10 is input to a comparison DA converting device 7, a comparison analog signal 13 from the device 7 and the analog DA output signal 11 from the DA converting device 5 are input to a DA comparison device 8 to compare the voltage value of both signals 11 and 13, and the diagonosis to see whether the DA converting device 5 is operated normally or not is carried out.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62178862A JPS6424351A (en) | 1987-07-20 | 1987-07-20 | Self-diagonosis device of da converting output unit for electron beam device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62178862A JPS6424351A (en) | 1987-07-20 | 1987-07-20 | Self-diagonosis device of da converting output unit for electron beam device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6424351A true JPS6424351A (en) | 1989-01-26 |
Family
ID=16055984
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62178862A Pending JPS6424351A (en) | 1987-07-20 | 1987-07-20 | Self-diagonosis device of da converting output unit for electron beam device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6424351A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100866203B1 (en) * | 2006-03-31 | 2008-10-30 | 가부시키가이샤 뉴플레어 테크놀로지 | Charged particle beam apparatus, abnormality detecting method for da converter device, charged particle beam writing method, and mask |
| JP2014123499A (en) * | 2012-12-21 | 2014-07-03 | Hitachi High-Technologies Corp | Arithmetic device and charged particle beam application apparatus |
| JP2016020921A (en) * | 2015-10-05 | 2016-02-04 | ラピスセミコンダクタ株式会社 | Semiconductor device control method |
-
1987
- 1987-07-20 JP JP62178862A patent/JPS6424351A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100866203B1 (en) * | 2006-03-31 | 2008-10-30 | 가부시키가이샤 뉴플레어 테크놀로지 | Charged particle beam apparatus, abnormality detecting method for da converter device, charged particle beam writing method, and mask |
| JP2014123499A (en) * | 2012-12-21 | 2014-07-03 | Hitachi High-Technologies Corp | Arithmetic device and charged particle beam application apparatus |
| JP2016020921A (en) * | 2015-10-05 | 2016-02-04 | ラピスセミコンダクタ株式会社 | Semiconductor device control method |
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