JPS6424340A - Emitter for electric field ionization type gas ion source - Google Patents
Emitter for electric field ionization type gas ion sourceInfo
- Publication number
- JPS6424340A JPS6424340A JP62180545A JP18054587A JPS6424340A JP S6424340 A JPS6424340 A JP S6424340A JP 62180545 A JP62180545 A JP 62180545A JP 18054587 A JP18054587 A JP 18054587A JP S6424340 A JPS6424340 A JP S6424340A
- Authority
- JP
- Japan
- Prior art keywords
- emitter
- tip
- insulating film
- gas
- electric field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005684 electric field Effects 0.000 title abstract 2
- 238000010884 ion-beam technique Methods 0.000 abstract 5
- 230000000694 effects Effects 0.000 abstract 2
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/06—Sources
- H01J2237/08—Ion sources
- H01J2237/0802—Field ionization sources
- H01J2237/0807—Gas field ion sources [GFIS]
Landscapes
- Electron Sources, Ion Sources (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62180545A JPS6424340A (en) | 1987-07-20 | 1987-07-20 | Emitter for electric field ionization type gas ion source |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62180545A JPS6424340A (en) | 1987-07-20 | 1987-07-20 | Emitter for electric field ionization type gas ion source |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6424340A true JPS6424340A (en) | 1989-01-26 |
Family
ID=16085151
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62180545A Pending JPS6424340A (en) | 1987-07-20 | 1987-07-20 | Emitter for electric field ionization type gas ion source |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6424340A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012074383A (ja) * | 2005-12-02 | 2012-04-12 | Arisu Corporation:Kk | イオン源、システム及び方法 |
EP3945539A1 (en) * | 2020-07-31 | 2022-02-02 | Centre National de la Recherche Scientifique | A gas ion gun |
-
1987
- 1987-07-20 JP JP62180545A patent/JPS6424340A/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012074383A (ja) * | 2005-12-02 | 2012-04-12 | Arisu Corporation:Kk | イオン源、システム及び方法 |
EP3945539A1 (en) * | 2020-07-31 | 2022-02-02 | Centre National de la Recherche Scientifique | A gas ion gun |
WO2022023094A1 (en) * | 2020-07-31 | 2022-02-03 | Centre National De La Recherche Scientifique | A gas ion gun |
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