Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric CorpfiledCriticalYokogawa Electric Corp
Priority to JP17872587ApriorityCriticalpatent/JPS6423763A/ja
Publication of JPS6423763ApublicationCriticalpatent/JPS6423763A/ja
Publication of JPH0578272B2publicationCriticalpatent/JPH0578272B2/ja