JPS6423658U - - Google Patents

Info

Publication number
JPS6423658U
JPS6423658U JP11661287U JP11661287U JPS6423658U JP S6423658 U JPS6423658 U JP S6423658U JP 11661287 U JP11661287 U JP 11661287U JP 11661287 U JP11661287 U JP 11661287U JP S6423658 U JPS6423658 U JP S6423658U
Authority
JP
Japan
Prior art keywords
defect
detects
mounting
defect detection
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11661287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11661287U priority Critical patent/JPS6423658U/ja
Publication of JPS6423658U publication Critical patent/JPS6423658U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP11661287U 1987-07-31 1987-07-31 Pending JPS6423658U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11661287U JPS6423658U (enrdf_load_stackoverflow) 1987-07-31 1987-07-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11661287U JPS6423658U (enrdf_load_stackoverflow) 1987-07-31 1987-07-31

Publications (1)

Publication Number Publication Date
JPS6423658U true JPS6423658U (enrdf_load_stackoverflow) 1989-02-08

Family

ID=31359301

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11661287U Pending JPS6423658U (enrdf_load_stackoverflow) 1987-07-31 1987-07-31

Country Status (1)

Country Link
JP (1) JPS6423658U (enrdf_load_stackoverflow)

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