JPS6423468A - Optical head support mechanism - Google Patents

Optical head support mechanism

Info

Publication number
JPS6423468A
JPS6423468A JP17848987A JP17848987A JPS6423468A JP S6423468 A JPS6423468 A JP S6423468A JP 17848987 A JP17848987 A JP 17848987A JP 17848987 A JP17848987 A JP 17848987A JP S6423468 A JPS6423468 A JP S6423468A
Authority
JP
Japan
Prior art keywords
gap
feeding
magnetic
shaft
optical head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17848987A
Other languages
Japanese (ja)
Inventor
Hiroaki Morifuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Home Electronics Ltd
NEC Corp
Original Assignee
NEC Home Electronics Ltd
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Home Electronics Ltd, Nippon Electric Co Ltd filed Critical NEC Home Electronics Ltd
Priority to JP17848987A priority Critical patent/JPS6423468A/en
Publication of JPS6423468A publication Critical patent/JPS6423468A/en
Pending legal-status Critical Current

Links

Landscapes

  • Bearings For Parts Moving Linearly (AREA)
  • Moving Of Heads (AREA)
  • Moving Of The Head For Recording And Reproducing By Optical Means (AREA)

Abstract

PURPOSE:To move an optical head at a high speed by using a magnetic bearing so as to support a feeding shaft in noncontact with a gap and moving freely the shaft in the feeding direction so as to apply gap control. CONSTITUTION:The magnetic field of a magnetic device A is given in a direction of the arrow (B), and when a current flows to a gap control coil 10 in the magnetic field, a force F is exerted vertically in figure to the coil 10 and the gap is adjusted vertically by the force F. This is similar in a magnetic device B and the gap is adjusted vertically by the magnetic devices A, B to move a feeding shaft 3 vertically. Moreover, the feeding shaft 3 is moved horizontally (in the left/right direction in figure) by the gap adjustment of magnetic devices C, D, and the shaft 3 is subject to gap control in noncontact by a magnetic bearing 6. Although the feeding shaft 3 and an optical head 1 incorporated thereto are driven in the direction of the arrow (A) by a drive mechanism (not shown), since the magnetic bearing 6 is formed in noncontact, the feeding head 1 is moved at a high speed without tilt or position deviation due to the feeding.
JP17848987A 1987-07-17 1987-07-17 Optical head support mechanism Pending JPS6423468A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17848987A JPS6423468A (en) 1987-07-17 1987-07-17 Optical head support mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17848987A JPS6423468A (en) 1987-07-17 1987-07-17 Optical head support mechanism

Publications (1)

Publication Number Publication Date
JPS6423468A true JPS6423468A (en) 1989-01-26

Family

ID=16049351

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17848987A Pending JPS6423468A (en) 1987-07-17 1987-07-17 Optical head support mechanism

Country Status (1)

Country Link
JP (1) JPS6423468A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8008884B2 (en) 2007-07-17 2011-08-30 Brooks Automation, Inc. Substrate processing apparatus with motors integral to chamber walls
US8267636B2 (en) 2007-05-08 2012-09-18 Brooks Automation, Inc. Substrate transport apparatus
US11002566B2 (en) 2007-06-27 2021-05-11 Brooks Automation, Inc. Position feedback for self bearing motor

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8267636B2 (en) 2007-05-08 2012-09-18 Brooks Automation, Inc. Substrate transport apparatus
US11002566B2 (en) 2007-06-27 2021-05-11 Brooks Automation, Inc. Position feedback for self bearing motor
US8008884B2 (en) 2007-07-17 2011-08-30 Brooks Automation, Inc. Substrate processing apparatus with motors integral to chamber walls
US8237391B2 (en) 2007-07-17 2012-08-07 Brooks Automation, Inc. Substrate processing apparatus with motors integral to chamber walls

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