JPS6423468A - Optical head support mechanism - Google Patents
Optical head support mechanismInfo
- Publication number
- JPS6423468A JPS6423468A JP17848987A JP17848987A JPS6423468A JP S6423468 A JPS6423468 A JP S6423468A JP 17848987 A JP17848987 A JP 17848987A JP 17848987 A JP17848987 A JP 17848987A JP S6423468 A JPS6423468 A JP S6423468A
- Authority
- JP
- Japan
- Prior art keywords
- gap
- feeding
- magnetic
- shaft
- optical head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Bearings For Parts Moving Linearly (AREA)
- Moving Of Heads (AREA)
- Moving Of The Head For Recording And Reproducing By Optical Means (AREA)
Abstract
PURPOSE:To move an optical head at a high speed by using a magnetic bearing so as to support a feeding shaft in noncontact with a gap and moving freely the shaft in the feeding direction so as to apply gap control. CONSTITUTION:The magnetic field of a magnetic device A is given in a direction of the arrow (B), and when a current flows to a gap control coil 10 in the magnetic field, a force F is exerted vertically in figure to the coil 10 and the gap is adjusted vertically by the force F. This is similar in a magnetic device B and the gap is adjusted vertically by the magnetic devices A, B to move a feeding shaft 3 vertically. Moreover, the feeding shaft 3 is moved horizontally (in the left/right direction in figure) by the gap adjustment of magnetic devices C, D, and the shaft 3 is subject to gap control in noncontact by a magnetic bearing 6. Although the feeding shaft 3 and an optical head 1 incorporated thereto are driven in the direction of the arrow (A) by a drive mechanism (not shown), since the magnetic bearing 6 is formed in noncontact, the feeding head 1 is moved at a high speed without tilt or position deviation due to the feeding.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17848987A JPS6423468A (en) | 1987-07-17 | 1987-07-17 | Optical head support mechanism |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17848987A JPS6423468A (en) | 1987-07-17 | 1987-07-17 | Optical head support mechanism |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6423468A true JPS6423468A (en) | 1989-01-26 |
Family
ID=16049351
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17848987A Pending JPS6423468A (en) | 1987-07-17 | 1987-07-17 | Optical head support mechanism |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6423468A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8008884B2 (en) | 2007-07-17 | 2011-08-30 | Brooks Automation, Inc. | Substrate processing apparatus with motors integral to chamber walls |
US8267636B2 (en) | 2007-05-08 | 2012-09-18 | Brooks Automation, Inc. | Substrate transport apparatus |
US11002566B2 (en) | 2007-06-27 | 2021-05-11 | Brooks Automation, Inc. | Position feedback for self bearing motor |
-
1987
- 1987-07-17 JP JP17848987A patent/JPS6423468A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8267636B2 (en) | 2007-05-08 | 2012-09-18 | Brooks Automation, Inc. | Substrate transport apparatus |
US11002566B2 (en) | 2007-06-27 | 2021-05-11 | Brooks Automation, Inc. | Position feedback for self bearing motor |
US8008884B2 (en) | 2007-07-17 | 2011-08-30 | Brooks Automation, Inc. | Substrate processing apparatus with motors integral to chamber walls |
US8237391B2 (en) | 2007-07-17 | 2012-08-07 | Brooks Automation, Inc. | Substrate processing apparatus with motors integral to chamber walls |
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