JPS6422062U - - Google Patents
Info
- Publication number
- JPS6422062U JPS6422062U JP11633687U JP11633687U JPS6422062U JP S6422062 U JPS6422062 U JP S6422062U JP 11633687 U JP11633687 U JP 11633687U JP 11633687 U JP11633687 U JP 11633687U JP S6422062 U JPS6422062 U JP S6422062U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- ring
- lid
- excimer
- gasket
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004809 Teflon Substances 0.000 claims description 3
- 229920006362 Teflon® Polymers 0.000 claims description 3
Landscapes
- Lasers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11633687U JPS6422062U (tr) | 1987-07-29 | 1987-07-29 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11633687U JPS6422062U (tr) | 1987-07-29 | 1987-07-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6422062U true JPS6422062U (tr) | 1989-02-03 |
Family
ID=31358778
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11633687U Pending JPS6422062U (tr) | 1987-07-29 | 1987-07-29 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6422062U (tr) |
-
1987
- 1987-07-29 JP JP11633687U patent/JPS6422062U/ja active Pending
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