JPS6422062U - - Google Patents
Info
- Publication number
- JPS6422062U JPS6422062U JP11633687U JP11633687U JPS6422062U JP S6422062 U JPS6422062 U JP S6422062U JP 11633687 U JP11633687 U JP 11633687U JP 11633687 U JP11633687 U JP 11633687U JP S6422062 U JPS6422062 U JP S6422062U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- ring
- lid
- excimer
- gasket
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004809 Teflon Substances 0.000 claims description 3
- 229920006362 Teflon® Polymers 0.000 claims description 3
Landscapes
- Lasers (AREA)
Description
第１図は本考案の一実施例に係るエキシマレー
ザ用チヤンバの断面図、第２図は他の実施例に係
るエキシマレーザ用チヤンバの断面図である。
１……室部、２……蓋部、３，９……ガスケツ
ト部、５，６，１３……溝、７，１０……ゴム製
のＯリング、８……テフロン製のＯリング（ガス
ケツト）、１１……テフロン製のシート（ガスケ
ツト）。
FIG. 1 is a cross-sectional view of an excimer laser chamber according to one embodiment of the present invention, and FIG. 2 is a cross-sectional view of an excimer laser chamber according to another embodiment. 1... Chamber part, 2... Lid part, 3, 9... Gasket part, 5, 6, 13... Groove, 7, 10... Rubber O-ring, 8... Teflon O-ring (gasket ), 11... Teflon sheet (gasket).
Claims (1)
部を塞ぐ蓋部と、該蓋部と室部間を密封するガス
ケツト部とよりなるエキシマレーザ用チヤンバに
おいて、 上記ガスケツト部を、上記室部の上記蓋部接触
面に形成した溝に嵌められ外部空気の流入を防止
するゴム製のＯリングと、該Ｏリングの内側に配
置され上記蓋部と室部の接触面間に介在してＯリ
ングから発生したガスの室部への流入と室部内の
エキシマの洩れを防止するテフロン製のガスケツ
トとにより形成したことを特徴とするエキシマレ
ーザ用チヤンバ。[Scope of Claim for Utility Model Registration] In an excimer laser chamber comprising a chamber in which an excimer is placed, a lid placed in the chamber to close the chamber, and a gasket to seal between the lid and the chamber. , a rubber O-ring that is fitted into a groove formed in the contact surface of the lid of the chamber to prevent external air from entering the gasket; and a rubber O-ring arranged inside the O-ring that connects the lid and the chamber. A chamber for an excimer laser, characterized in that it is formed by a Teflon gasket interposed between the contact surfaces of the O-ring to prevent gas generated from the O-ring from flowing into the chamber and to prevent leakage of excimer in the chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11633687U JPS6422062U (en) | 1987-07-29 | 1987-07-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11633687U JPS6422062U (en) | 1987-07-29 | 1987-07-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6422062U true JPS6422062U (en) | 1989-02-03 |
Family
ID=31358778
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11633687U Pending JPS6422062U (en) | 1987-07-29 | 1987-07-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6422062U (en) |
-
1987
- 1987-07-29 JP JP11633687U patent/JPS6422062U/ja active Pending
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