JPS6422062U - - Google Patents

Info

Publication number
JPS6422062U
JPS6422062U JP11633687U JP11633687U JPS6422062U JP S6422062 U JPS6422062 U JP S6422062U JP 11633687 U JP11633687 U JP 11633687U JP 11633687 U JP11633687 U JP 11633687U JP S6422062 U JPS6422062 U JP S6422062U
Authority
JP
Japan
Prior art keywords
chamber
ring
lid
excimer
gasket
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11633687U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11633687U priority Critical patent/JPS6422062U/ja
Publication of JPS6422062U publication Critical patent/JPS6422062U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Lasers (AREA)
JP11633687U 1987-07-29 1987-07-29 Pending JPS6422062U (id)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11633687U JPS6422062U (id) 1987-07-29 1987-07-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11633687U JPS6422062U (id) 1987-07-29 1987-07-29

Publications (1)

Publication Number Publication Date
JPS6422062U true JPS6422062U (id) 1989-02-03

Family

ID=31358778

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11633687U Pending JPS6422062U (id) 1987-07-29 1987-07-29

Country Status (1)

Country Link
JP (1) JPS6422062U (id)

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