JPS642109U - - Google Patents

Info

Publication number
JPS642109U
JPS642109U JP9566287U JP9566287U JPS642109U JP S642109 U JPS642109 U JP S642109U JP 9566287 U JP9566287 U JP 9566287U JP 9566287 U JP9566287 U JP 9566287U JP S642109 U JPS642109 U JP S642109U
Authority
JP
Japan
Prior art keywords
moving body
mirror
linear position
receiving element
light source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9566287U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0535286Y2 (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9566287U priority Critical patent/JPH0535286Y2/ja
Publication of JPS642109U publication Critical patent/JPS642109U/ja
Application granted granted Critical
Publication of JPH0535286Y2 publication Critical patent/JPH0535286Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP9566287U 1987-06-22 1987-06-22 Expired - Lifetime JPH0535286Y2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9566287U JPH0535286Y2 (de) 1987-06-22 1987-06-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9566287U JPH0535286Y2 (de) 1987-06-22 1987-06-22

Publications (2)

Publication Number Publication Date
JPS642109U true JPS642109U (de) 1989-01-09
JPH0535286Y2 JPH0535286Y2 (de) 1993-09-08

Family

ID=30960453

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9566287U Expired - Lifetime JPH0535286Y2 (de) 1987-06-22 1987-06-22

Country Status (1)

Country Link
JP (1) JPH0535286Y2 (de)

Also Published As

Publication number Publication date
JPH0535286Y2 (de) 1993-09-08

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