JPS6420943A - Precision-positioning table - Google Patents

Precision-positioning table

Info

Publication number
JPS6420943A
JPS6420943A JP62175845A JP17584587A JPS6420943A JP S6420943 A JPS6420943 A JP S6420943A JP 62175845 A JP62175845 A JP 62175845A JP 17584587 A JP17584587 A JP 17584587A JP S6420943 A JPS6420943 A JP S6420943A
Authority
JP
Japan
Prior art keywords
adjustment
compressed air
guide
fed
integrally
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62175845A
Other languages
Japanese (ja)
Inventor
Takehiko Nomura
Kiyoshi Kamiya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP62175845A priority Critical patent/JPS6420943A/en
Publication of JPS6420943A publication Critical patent/JPS6420943A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25Movable or adjustable work or tool supports
    • B23Q1/26Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/28Means for securing sliding members in any desired position
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q2210/00Machine tools incorporating a specific component
    • B23Q2210/002Flexures

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Units (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

PURPOSE:To improve the positioning precision at a stop with a simple structure by providing a braking means braking a running body with the friction between the running body driven along a guide and the guide fitted to the outside section. CONSTITUTION:The compressed air is fed to a bearing 4 and sprayed to the side face of a guide 1 to constitute a static pressure gas bearing, which is moved by a driving device. When it is to be stopped at the preset position, the drive of the driving device is stopped, the compressed air is fed to a feed pipe 15 at the same time, the compressed air is fed between an integrally notched spring 9 and a holder 8, the integrally notched spring 9 is depressed, and the brake pad 12 is brought into contact with the upper face of the guide 1 to generate a brake action. The adjustment of the brake action force can be performed by the adjustment of the compressed air pressure, adjustment of the distance between the holder 8 and the integrally notched spring 9 by an adjusting screw 13, and adjustment of the protrusion quantity of the brake pad 12.
JP62175845A 1987-07-16 1987-07-16 Precision-positioning table Pending JPS6420943A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62175845A JPS6420943A (en) 1987-07-16 1987-07-16 Precision-positioning table

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62175845A JPS6420943A (en) 1987-07-16 1987-07-16 Precision-positioning table

Publications (1)

Publication Number Publication Date
JPS6420943A true JPS6420943A (en) 1989-01-24

Family

ID=16003218

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62175845A Pending JPS6420943A (en) 1987-07-16 1987-07-16 Precision-positioning table

Country Status (1)

Country Link
JP (1) JPS6420943A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04106338U (en) * 1991-02-21 1992-09-14 黒崎窯業株式会社 Joint material for installing molded refractories
JP2015018978A (en) * 2013-07-12 2015-01-29 株式会社日立ハイテクノロジーズ Active brake, sample stage with active brake, and charged particle beam device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04106338U (en) * 1991-02-21 1992-09-14 黒崎窯業株式会社 Joint material for installing molded refractories
JP2015018978A (en) * 2013-07-12 2015-01-29 株式会社日立ハイテクノロジーズ Active brake, sample stage with active brake, and charged particle beam device

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