JPS6420943A - Precision-positioning table - Google Patents
Precision-positioning tableInfo
- Publication number
- JPS6420943A JPS6420943A JP62175845A JP17584587A JPS6420943A JP S6420943 A JPS6420943 A JP S6420943A JP 62175845 A JP62175845 A JP 62175845A JP 17584587 A JP17584587 A JP 17584587A JP S6420943 A JPS6420943 A JP S6420943A
- Authority
- JP
- Japan
- Prior art keywords
- adjustment
- compressed air
- guide
- fed
- integrally
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/28—Means for securing sliding members in any desired position
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q2210/00—Machine tools incorporating a specific component
- B23Q2210/002—Flexures
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Machine Tool Units (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
PURPOSE:To improve the positioning precision at a stop with a simple structure by providing a braking means braking a running body with the friction between the running body driven along a guide and the guide fitted to the outside section. CONSTITUTION:The compressed air is fed to a bearing 4 and sprayed to the side face of a guide 1 to constitute a static pressure gas bearing, which is moved by a driving device. When it is to be stopped at the preset position, the drive of the driving device is stopped, the compressed air is fed to a feed pipe 15 at the same time, the compressed air is fed between an integrally notched spring 9 and a holder 8, the integrally notched spring 9 is depressed, and the brake pad 12 is brought into contact with the upper face of the guide 1 to generate a brake action. The adjustment of the brake action force can be performed by the adjustment of the compressed air pressure, adjustment of the distance between the holder 8 and the integrally notched spring 9 by an adjusting screw 13, and adjustment of the protrusion quantity of the brake pad 12.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62175845A JPS6420943A (en) | 1987-07-16 | 1987-07-16 | Precision-positioning table |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62175845A JPS6420943A (en) | 1987-07-16 | 1987-07-16 | Precision-positioning table |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6420943A true JPS6420943A (en) | 1989-01-24 |
Family
ID=16003218
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62175845A Pending JPS6420943A (en) | 1987-07-16 | 1987-07-16 | Precision-positioning table |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6420943A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04106338U (en) * | 1991-02-21 | 1992-09-14 | 黒崎窯業株式会社 | Joint material for installing molded refractories |
JP2015018978A (en) * | 2013-07-12 | 2015-01-29 | 株式会社日立ハイテクノロジーズ | Active brake, sample stage with active brake, and charged particle beam device |
-
1987
- 1987-07-16 JP JP62175845A patent/JPS6420943A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04106338U (en) * | 1991-02-21 | 1992-09-14 | 黒崎窯業株式会社 | Joint material for installing molded refractories |
JP2015018978A (en) * | 2013-07-12 | 2015-01-29 | 株式会社日立ハイテクノロジーズ | Active brake, sample stage with active brake, and charged particle beam device |
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