JPS6420723U - - Google Patents

Info

Publication number
JPS6420723U
JPS6420723U JP11491287U JP11491287U JPS6420723U JP S6420723 U JPS6420723 U JP S6420723U JP 11491287 U JP11491287 U JP 11491287U JP 11491287 U JP11491287 U JP 11491287U JP S6420723 U JPS6420723 U JP S6420723U
Authority
JP
Japan
Prior art keywords
wafer
width
support jig
groove
groove located
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11491287U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0644102Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11491287U priority Critical patent/JPH0644102Y2/ja
Publication of JPS6420723U publication Critical patent/JPS6420723U/ja
Application granted granted Critical
Publication of JPH0644102Y2 publication Critical patent/JPH0644102Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP11491287U 1987-07-27 1987-07-27 ウエハ−の支持治具 Expired - Lifetime JPH0644102Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11491287U JPH0644102Y2 (ja) 1987-07-27 1987-07-27 ウエハ−の支持治具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11491287U JPH0644102Y2 (ja) 1987-07-27 1987-07-27 ウエハ−の支持治具

Publications (2)

Publication Number Publication Date
JPS6420723U true JPS6420723U (enrdf_load_stackoverflow) 1989-02-01
JPH0644102Y2 JPH0644102Y2 (ja) 1994-11-14

Family

ID=31356087

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11491287U Expired - Lifetime JPH0644102Y2 (ja) 1987-07-27 1987-07-27 ウエハ−の支持治具

Country Status (1)

Country Link
JP (1) JPH0644102Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0644102Y2 (ja) 1994-11-14

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