JPS6418594A - Focus controller for laser beam machine - Google Patents
Focus controller for laser beam machineInfo
- Publication number
- JPS6418594A JPS6418594A JP62172882A JP17288287A JPS6418594A JP S6418594 A JPS6418594 A JP S6418594A JP 62172882 A JP62172882 A JP 62172882A JP 17288287 A JP17288287 A JP 17288287A JP S6418594 A JPS6418594 A JP S6418594A
- Authority
- JP
- Japan
- Prior art keywords
- focus
- converter
- servo
- focusing state
- laser beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To always perform the stable laser beam machining by outputting a control signal to change over a switch from a focus servo loop to a position servo to maintain the position in a focusing state at the time of being out of the focus control range. CONSTITUTION:When the output of a comparator 10 as a defocus is made to '0', a switch circuit 3 is connected to the position servo. A position command is issued from a CPU 16 and the focus search is carried out via a D/A converter 15 and when the output of the comparator 10 is made to '1' and the focus enters the controllable range, the switch circuit 3 acts on a focus servo and the focusing state is maintained. At the same time when the focusing state is attained, the position of an objective lens 7 is taken in the CPU 16 via a detector 1 and an A/D converter 14 and the positional data corresponding to its value is set on the D/A converter 15. By this method, a focus spot strikes upon the difference in level or a crowded place of a pattern on the surface of a work 24.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62172882A JPS6418594A (en) | 1987-07-13 | 1987-07-13 | Focus controller for laser beam machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62172882A JPS6418594A (en) | 1987-07-13 | 1987-07-13 | Focus controller for laser beam machine |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6418594A true JPS6418594A (en) | 1989-01-23 |
Family
ID=15950066
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62172882A Pending JPS6418594A (en) | 1987-07-13 | 1987-07-13 | Focus controller for laser beam machine |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6418594A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5459105A (en) * | 1990-10-30 | 1995-10-17 | Mitsubishi Denki Kabushiki Kaisha | Method of manufacturing a semiconductor device having multilayer insulating films |
JPH0919784A (en) * | 1995-07-03 | 1997-01-21 | Nec Corp | Device and method for laser patterning |
JP2008093723A (en) * | 2006-10-13 | 2008-04-24 | Pulstec Industrial Co Ltd | Laser beam fine machining apparatus |
JP2009016376A (en) * | 2007-06-29 | 2009-01-22 | Hitachi Computer Peripherals Co Ltd | Focus control method, and laser irradiation device using it |
-
1987
- 1987-07-13 JP JP62172882A patent/JPS6418594A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5459105A (en) * | 1990-10-30 | 1995-10-17 | Mitsubishi Denki Kabushiki Kaisha | Method of manufacturing a semiconductor device having multilayer insulating films |
US5721156A (en) * | 1990-10-30 | 1998-02-24 | Mitsubishi Denki Kabushiki Kaisha | Method of manufacturing a semiconductor device with a planarized integrated circuit |
JPH0919784A (en) * | 1995-07-03 | 1997-01-21 | Nec Corp | Device and method for laser patterning |
JP2008093723A (en) * | 2006-10-13 | 2008-04-24 | Pulstec Industrial Co Ltd | Laser beam fine machining apparatus |
JP2009016376A (en) * | 2007-06-29 | 2009-01-22 | Hitachi Computer Peripherals Co Ltd | Focus control method, and laser irradiation device using it |
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