JPS6418594A - Focus controller for laser beam machine - Google Patents

Focus controller for laser beam machine

Info

Publication number
JPS6418594A
JPS6418594A JP62172882A JP17288287A JPS6418594A JP S6418594 A JPS6418594 A JP S6418594A JP 62172882 A JP62172882 A JP 62172882A JP 17288287 A JP17288287 A JP 17288287A JP S6418594 A JPS6418594 A JP S6418594A
Authority
JP
Japan
Prior art keywords
focus
converter
servo
focusing state
laser beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62172882A
Other languages
Japanese (ja)
Inventor
Toshio Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP62172882A priority Critical patent/JPS6418594A/en
Publication of JPS6418594A publication Critical patent/JPS6418594A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To always perform the stable laser beam machining by outputting a control signal to change over a switch from a focus servo loop to a position servo to maintain the position in a focusing state at the time of being out of the focus control range. CONSTITUTION:When the output of a comparator 10 as a defocus is made to '0', a switch circuit 3 is connected to the position servo. A position command is issued from a CPU 16 and the focus search is carried out via a D/A converter 15 and when the output of the comparator 10 is made to '1' and the focus enters the controllable range, the switch circuit 3 acts on a focus servo and the focusing state is maintained. At the same time when the focusing state is attained, the position of an objective lens 7 is taken in the CPU 16 via a detector 1 and an A/D converter 14 and the positional data corresponding to its value is set on the D/A converter 15. By this method, a focus spot strikes upon the difference in level or a crowded place of a pattern on the surface of a work 24.
JP62172882A 1987-07-13 1987-07-13 Focus controller for laser beam machine Pending JPS6418594A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62172882A JPS6418594A (en) 1987-07-13 1987-07-13 Focus controller for laser beam machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62172882A JPS6418594A (en) 1987-07-13 1987-07-13 Focus controller for laser beam machine

Publications (1)

Publication Number Publication Date
JPS6418594A true JPS6418594A (en) 1989-01-23

Family

ID=15950066

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62172882A Pending JPS6418594A (en) 1987-07-13 1987-07-13 Focus controller for laser beam machine

Country Status (1)

Country Link
JP (1) JPS6418594A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5459105A (en) * 1990-10-30 1995-10-17 Mitsubishi Denki Kabushiki Kaisha Method of manufacturing a semiconductor device having multilayer insulating films
JPH0919784A (en) * 1995-07-03 1997-01-21 Nec Corp Device and method for laser patterning
JP2008093723A (en) * 2006-10-13 2008-04-24 Pulstec Industrial Co Ltd Laser beam fine machining apparatus
JP2009016376A (en) * 2007-06-29 2009-01-22 Hitachi Computer Peripherals Co Ltd Focus control method, and laser irradiation device using it

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5459105A (en) * 1990-10-30 1995-10-17 Mitsubishi Denki Kabushiki Kaisha Method of manufacturing a semiconductor device having multilayer insulating films
US5721156A (en) * 1990-10-30 1998-02-24 Mitsubishi Denki Kabushiki Kaisha Method of manufacturing a semiconductor device with a planarized integrated circuit
JPH0919784A (en) * 1995-07-03 1997-01-21 Nec Corp Device and method for laser patterning
JP2008093723A (en) * 2006-10-13 2008-04-24 Pulstec Industrial Co Ltd Laser beam fine machining apparatus
JP2009016376A (en) * 2007-06-29 2009-01-22 Hitachi Computer Peripherals Co Ltd Focus control method, and laser irradiation device using it

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