JPS641849U - - Google Patents
Info
- Publication number
- JPS641849U JPS641849U JP9599087U JP9599087U JPS641849U JP S641849 U JPS641849 U JP S641849U JP 9599087 U JP9599087 U JP 9599087U JP 9599087 U JP9599087 U JP 9599087U JP S641849 U JPS641849 U JP S641849U
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- substrate
- conveying
- substrate during
- conveyance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims 4
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003380 propellant Substances 0.000 description 1
Landscapes
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9599087U JPS641849U (OSRAM) | 1987-06-24 | 1987-06-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9599087U JPS641849U (OSRAM) | 1987-06-24 | 1987-06-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS641849U true JPS641849U (OSRAM) | 1989-01-09 |
Family
ID=30961220
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9599087U Pending JPS641849U (OSRAM) | 1987-06-24 | 1987-06-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS641849U (OSRAM) |
-
1987
- 1987-06-24 JP JP9599087U patent/JPS641849U/ja active Pending