JPS6418002U - - Google Patents
Info
- Publication number
- JPS6418002U JPS6418002U JP11246087U JP11246087U JPS6418002U JP S6418002 U JPS6418002 U JP S6418002U JP 11246087 U JP11246087 U JP 11246087U JP 11246087 U JP11246087 U JP 11246087U JP S6418002 U JPS6418002 U JP S6418002U
- Authority
- JP
- Japan
- Prior art keywords
- shutter
- gutter
- screen
- guide plate
- opened
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010411 cooking Methods 0.000 claims description 2
- 239000010865 sewage Substances 0.000 claims description 2
- 230000004308 accommodation Effects 0.000 description 1
Landscapes
- Refuse Receptacles (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11246087U JPS6418002U (US20020095090A1-20020718-M00002.png) | 1987-07-21 | 1987-07-21 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11246087U JPS6418002U (US20020095090A1-20020718-M00002.png) | 1987-07-21 | 1987-07-21 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6418002U true JPS6418002U (US20020095090A1-20020718-M00002.png) | 1989-01-30 |
Family
ID=31351415
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11246087U Pending JPS6418002U (US20020095090A1-20020718-M00002.png) | 1987-07-21 | 1987-07-21 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6418002U (US20020095090A1-20020718-M00002.png) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7812964B2 (en) | 2006-11-15 | 2010-10-12 | Zygo Corporation | Distance measuring interferometer and encoder metrology systems for use in lithography tools |
US7812965B2 (en) | 2006-12-11 | 2010-10-12 | Zygo Corporation | Multiple-degree of freedom interferometer with compensation for gas effects |
US7826063B2 (en) | 2005-04-29 | 2010-11-02 | Zygo Corporation | Compensation of effects of atmospheric perturbations in optical metrology |
US7894075B2 (en) | 2006-12-11 | 2011-02-22 | Zygo Corporation | Multiple-degree of freedom interferometer with compensation for gas effects |
-
1987
- 1987-07-21 JP JP11246087U patent/JPS6418002U/ja active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7826063B2 (en) | 2005-04-29 | 2010-11-02 | Zygo Corporation | Compensation of effects of atmospheric perturbations in optical metrology |
US7812964B2 (en) | 2006-11-15 | 2010-10-12 | Zygo Corporation | Distance measuring interferometer and encoder metrology systems for use in lithography tools |
US7812965B2 (en) | 2006-12-11 | 2010-10-12 | Zygo Corporation | Multiple-degree of freedom interferometer with compensation for gas effects |
US7894075B2 (en) | 2006-12-11 | 2011-02-22 | Zygo Corporation | Multiple-degree of freedom interferometer with compensation for gas effects |