JPS6417368A - Surface analyzer - Google Patents
Surface analyzerInfo
- Publication number
- JPS6417368A JPS6417368A JP62171781A JP17178187A JPS6417368A JP S6417368 A JPS6417368 A JP S6417368A JP 62171781 A JP62171781 A JP 62171781A JP 17178187 A JP17178187 A JP 17178187A JP S6417368 A JPS6417368 A JP S6417368A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- diffracted
- sample
- pattern
- crystal structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 abstract 5
- 239000013078 crystal Substances 0.000 abstract 3
- 238000001228 spectrum Methods 0.000 abstract 2
- 230000001678 irradiating effect Effects 0.000 abstract 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
PURPOSE:To make the crystallizability of a sample surface monitorable by installing an electron beam diffractor in an ultra-high vacuum chamber, and checking up on the pattern of a diffracted electron beam. CONSTITUTION:In an ultra-high vacuum chamber 4, there are provided with an electron gun, irradiating an electron beam OMEGA to the surface of a sample SIGMA, and a diffracted electron beam observer, observing a pattern of the electron beam OMEGA diffracted on the surface of the sample SIGMA. With this constitution, crystallizability of the sample SIGMA surface is observable at that spot all the time and, what is more, a crystal structure of the surface and an element abundance or the like are still more clearly findable. Moreover, if a time variation in the diffracted pattern and turbulence of the crystal structure are made into a data base, the obtained spectrum is compensated, thus such a spectrum that shows a true crystal structure is securable.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62171781A JPS6417368A (en) | 1987-07-09 | 1987-07-09 | Surface analyzer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62171781A JPS6417368A (en) | 1987-07-09 | 1987-07-09 | Surface analyzer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6417368A true JPS6417368A (en) | 1989-01-20 |
Family
ID=15929563
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62171781A Pending JPS6417368A (en) | 1987-07-09 | 1987-07-09 | Surface analyzer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6417368A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002518808A (en) * | 1998-06-18 | 2002-06-25 | ザ リージェンツ オブ ザ ユニヴァーシティー オブ カリフォルニア | CCD camera for transmission electron microscope |
| JP2007178445A (en) * | 2007-03-05 | 2007-07-12 | Jeol Ltd | Quantitative analysis method in sample analyzer |
-
1987
- 1987-07-09 JP JP62171781A patent/JPS6417368A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002518808A (en) * | 1998-06-18 | 2002-06-25 | ザ リージェンツ オブ ザ ユニヴァーシティー オブ カリフォルニア | CCD camera for transmission electron microscope |
| JP4757383B2 (en) * | 1998-06-18 | 2011-08-24 | ザ リージェンツ オブ ザ ユニヴァーシティ オブ カリフォルニア | CCD camera for transmission electron microscope |
| JP2007178445A (en) * | 2007-03-05 | 2007-07-12 | Jeol Ltd | Quantitative analysis method in sample analyzer |
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