JPS6417089U - - Google Patents
Info
- Publication number
- JPS6417089U JPS6417089U JP11064587U JP11064587U JPS6417089U JP S6417089 U JPS6417089 U JP S6417089U JP 11064587 U JP11064587 U JP 11064587U JP 11064587 U JP11064587 U JP 11064587U JP S6417089 U JPS6417089 U JP S6417089U
- Authority
- JP
- Japan
- Prior art keywords
- porous material
- view
- cylindrical body
- disc
- body made
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011148 porous material Substances 0.000 claims description 3
Description
第１図は本考案に係わる微小流量制限装置の一
実施例を示す平面図、第２図は第１図の矢視−
線に沿う縦断側面図、第３図は第２図の矢印
部分の拡大縦断側面図、第４図は他の実施例を示
す縦断側面図、第５図は作用説明図、第６図は従
来の微小流量制限装置を示す平面図、第７図は第
６図の矢視−線に沿う縦断側面図、第８図は
第７図の矢印部分の拡大縦断側面図である。
２，３または７，８……流路、４……多孔物質
製円板、９……多孔物質製円筒体。
FIG. 1 is a plan view showing an embodiment of a micro flow restriction device according to the present invention, and FIG. 2 is a view taken from the arrow in FIG.
3 is an enlarged vertical sectional side view of the arrowed part in FIG. 2, FIG. 4 is a vertical sectional side view showing another embodiment, FIG. 5 is an explanatory view of the operation, and FIG. 6 is a conventional FIG. 7 is a vertical sectional side view taken along the arrow line in FIG. 6, and FIG. 8 is an enlarged vertical sectional side view of the arrowed portion in FIG. 7. 2, 3 or 7, 8...channel, 4...disc made of porous material, 9...cylindrical body made of porous material.
Claims (1)
る円板または円筒体を介装したことを特徴とする
微小流量制限装置。 A minute flow rate restriction device characterized in that a disc or cylindrical body made of a porous material is interposed in a passage communicating with a vacuum space.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11064587U JPS6417089U (en) | 1987-07-21 | 1987-07-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11064587U JPS6417089U (en) | 1987-07-21 | 1987-07-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6417089U true JPS6417089U (en) | 1989-01-27 |
Family
ID=31347990
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11064587U Pending JPS6417089U (en) | 1987-07-21 | 1987-07-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6417089U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5535587A (en) * | 1978-09-06 | 1980-03-12 | Matsushita Electric Ind Co Ltd | Multiple sound reception device |
-
1987
- 1987-07-21 JP JP11064587U patent/JPS6417089U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5535587A (en) * | 1978-09-06 | 1980-03-12 | Matsushita Electric Ind Co Ltd | Multiple sound reception device |