JPS6417000A - Artificial white x-ray source - Google Patents
Artificial white x-ray sourceInfo
- Publication number
- JPS6417000A JPS6417000A JP17239487A JP17239487A JPS6417000A JP S6417000 A JPS6417000 A JP S6417000A JP 17239487 A JP17239487 A JP 17239487A JP 17239487 A JP17239487 A JP 17239487A JP S6417000 A JPS6417000 A JP S6417000A
- Authority
- JP
- Japan
- Prior art keywords
- rays
- rotating plate
- target
- characteristic
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- X-Ray Techniques (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
PURPOSE:To artificially form white X-rays by projecting electron rays to a target arranged with different materials on the same disk centering at the center of rotation of a rotating plate. CONSTITUTION:The circular rotating plate 21 is mounted onto a shaft 22 and is rotated by a rotational driving mechanism 23. An annular recess 24 centering at the shaft 22 is provided onto one face of the rotating plate 21 and materials which emit characteristic X-rays of wavelengths varying each slightly are embedded into the recess 24 to constitute the target 25. The characteristic X-rays 32 are radiated from the target 25 when the electron rays 29 are projected to the target 25 from an electron gun 28 while the rotating plate 21 is kept rotated. The parts of the target 25 to which the electron rays 29 are projected consist of the successively different materials as the rotating plate 21 rotates and, therefore, the characteristic X-rays of the successively varying wavelengths are radiated. The nearly white X-rays are thus artificially and continuously obtd. by rotating the rotating plate 21 at a high speed.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17239487A JPH0827400B2 (en) | 1987-07-10 | 1987-07-10 | Pseudo white X-ray source |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17239487A JPH0827400B2 (en) | 1987-07-10 | 1987-07-10 | Pseudo white X-ray source |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6417000A true JPS6417000A (en) | 1989-01-20 |
JPH0827400B2 JPH0827400B2 (en) | 1996-03-21 |
Family
ID=15941120
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17239487A Expired - Lifetime JPH0827400B2 (en) | 1987-07-10 | 1987-07-10 | Pseudo white X-ray source |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0827400B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2517671A (en) * | 2013-03-15 | 2015-03-04 | Nikon Metrology Nv | X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target and rotary vacuum seal |
-
1987
- 1987-07-10 JP JP17239487A patent/JPH0827400B2/en not_active Expired - Lifetime
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2517671A (en) * | 2013-03-15 | 2015-03-04 | Nikon Metrology Nv | X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target and rotary vacuum seal |
US9941090B2 (en) | 2013-03-15 | 2018-04-10 | Nikon Metrology Nv | X-ray source, high-voltage generator, electron beam gun, rotary target assembly, and rotary vacuum seal |
US9947501B2 (en) | 2013-03-15 | 2018-04-17 | Nikon Metrology Nv | X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal |
US9966217B2 (en) | 2013-03-15 | 2018-05-08 | Nikon Metrology Nv | X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal |
US10008357B2 (en) | 2013-03-15 | 2018-06-26 | Nikon Metrology Nv | X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal |
US10020157B2 (en) | 2013-03-15 | 2018-07-10 | Nikon Metrology Nv | X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal |
US10096446B2 (en) | 2013-03-15 | 2018-10-09 | Nikon Metrology Nv | X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal |
US10102997B2 (en) | 2013-03-15 | 2018-10-16 | Nikon Metrology Nv | X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal |
Also Published As
Publication number | Publication date |
---|---|
JPH0827400B2 (en) | 1996-03-21 |
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