JPS6417000A - Artificial white x-ray source - Google Patents

Artificial white x-ray source

Info

Publication number
JPS6417000A
JPS6417000A JP17239487A JP17239487A JPS6417000A JP S6417000 A JPS6417000 A JP S6417000A JP 17239487 A JP17239487 A JP 17239487A JP 17239487 A JP17239487 A JP 17239487A JP S6417000 A JPS6417000 A JP S6417000A
Authority
JP
Japan
Prior art keywords
rays
rotating plate
target
characteristic
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17239487A
Other languages
Japanese (ja)
Other versions
JPH0827400B2 (en
Inventor
Kazuhiko Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Aviation Electronics Industry Ltd
Original Assignee
Japan Aviation Electronics Industry Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Aviation Electronics Industry Ltd filed Critical Japan Aviation Electronics Industry Ltd
Priority to JP17239487A priority Critical patent/JPH0827400B2/en
Publication of JPS6417000A publication Critical patent/JPS6417000A/en
Publication of JPH0827400B2 publication Critical patent/JPH0827400B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • X-Ray Techniques (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To artificially form white X-rays by projecting electron rays to a target arranged with different materials on the same disk centering at the center of rotation of a rotating plate. CONSTITUTION:The circular rotating plate 21 is mounted onto a shaft 22 and is rotated by a rotational driving mechanism 23. An annular recess 24 centering at the shaft 22 is provided onto one face of the rotating plate 21 and materials which emit characteristic X-rays of wavelengths varying each slightly are embedded into the recess 24 to constitute the target 25. The characteristic X-rays 32 are radiated from the target 25 when the electron rays 29 are projected to the target 25 from an electron gun 28 while the rotating plate 21 is kept rotated. The parts of the target 25 to which the electron rays 29 are projected consist of the successively different materials as the rotating plate 21 rotates and, therefore, the characteristic X-rays of the successively varying wavelengths are radiated. The nearly white X-rays are thus artificially and continuously obtd. by rotating the rotating plate 21 at a high speed.
JP17239487A 1987-07-10 1987-07-10 Pseudo white X-ray source Expired - Lifetime JPH0827400B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17239487A JPH0827400B2 (en) 1987-07-10 1987-07-10 Pseudo white X-ray source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17239487A JPH0827400B2 (en) 1987-07-10 1987-07-10 Pseudo white X-ray source

Publications (2)

Publication Number Publication Date
JPS6417000A true JPS6417000A (en) 1989-01-20
JPH0827400B2 JPH0827400B2 (en) 1996-03-21

Family

ID=15941120

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17239487A Expired - Lifetime JPH0827400B2 (en) 1987-07-10 1987-07-10 Pseudo white X-ray source

Country Status (1)

Country Link
JP (1) JPH0827400B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2517671A (en) * 2013-03-15 2015-03-04 Nikon Metrology Nv X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target and rotary vacuum seal

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2517671A (en) * 2013-03-15 2015-03-04 Nikon Metrology Nv X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target and rotary vacuum seal
US9941090B2 (en) 2013-03-15 2018-04-10 Nikon Metrology Nv X-ray source, high-voltage generator, electron beam gun, rotary target assembly, and rotary vacuum seal
US9947501B2 (en) 2013-03-15 2018-04-17 Nikon Metrology Nv X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal
US9966217B2 (en) 2013-03-15 2018-05-08 Nikon Metrology Nv X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal
US10008357B2 (en) 2013-03-15 2018-06-26 Nikon Metrology Nv X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal
US10020157B2 (en) 2013-03-15 2018-07-10 Nikon Metrology Nv X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal
US10096446B2 (en) 2013-03-15 2018-10-09 Nikon Metrology Nv X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal
US10102997B2 (en) 2013-03-15 2018-10-16 Nikon Metrology Nv X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal

Also Published As

Publication number Publication date
JPH0827400B2 (en) 1996-03-21

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