JPS6416633U - - Google Patents

Info

Publication number

JPS6416633U

JPS6416633U JP11253087U JP11253087U JPS6416633U JP S6416633 U JPS6416633 U JP S6416633U JP 11253087 U JP11253087 U JP 11253087U JP 11253087 U JP11253087 U JP 11253087U JP S6416633 U JPS6416633 U JP S6416633U

Authority

JP

Japan

Prior art keywords

head

thin film

cvd

substrate

transport means

Prior art date

1987-07-21

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000004519 manufacturing process Methods 0.000 claims description 6
• 239000010409 thin film Substances 0.000 claims description 6
• 239000004065 semiconductor Substances 0.000 claims description 5
• 239000000758 substrate Substances 0.000 claims description 3
• 238000010438 heat treatment Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
• 239000010408 film Substances 0.000 description 1
• 230000005855 radiation Effects 0.000 description 1
• 229910052710 silicon Inorganic materials 0.000 description 1
• 239000010703 silicon Substances 0.000 description 1

Cited By (1)