JPS6416632U - - Google Patents
Info
- Publication number
- JPS6416632U JPS6416632U JP11012687U JP11012687U JPS6416632U JP S6416632 U JPS6416632 U JP S6416632U JP 11012687 U JP11012687 U JP 11012687U JP 11012687 U JP11012687 U JP 11012687U JP S6416632 U JPS6416632 U JP S6416632U
- Authority
- JP
- Japan
- Prior art keywords
- discharge
- reaction tube
- discharge port
- ring
- phase growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 3
- 238000007599 discharging Methods 0.000 claims 2
- 239000012495 reaction gas Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 235000012431 wafers Nutrition 0.000 claims 2
- 239000007789 gas Substances 0.000 claims 1
- 239000012071 phase Substances 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11012687U JPS6416632U (es) | 1987-07-20 | 1987-07-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11012687U JPS6416632U (es) | 1987-07-20 | 1987-07-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6416632U true JPS6416632U (es) | 1989-01-27 |
Family
ID=31347000
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11012687U Pending JPS6416632U (es) | 1987-07-20 | 1987-07-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6416632U (es) |
-
1987
- 1987-07-20 JP JP11012687U patent/JPS6416632U/ja active Pending