JPS6416540U - - Google Patents

Info

Publication number
JPS6416540U
JPS6416540U JP11106287U JP11106287U JPS6416540U JP S6416540 U JPS6416540 U JP S6416540U JP 11106287 U JP11106287 U JP 11106287U JP 11106287 U JP11106287 U JP 11106287U JP S6416540 U JPS6416540 U JP S6416540U
Authority
JP
Japan
Prior art keywords
clean bench
transfer device
dustproof cover
slit
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11106287U
Other languages
English (en)
Japanese (ja)
Other versions
JPH068428Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987111062U priority Critical patent/JPH068428Y2/ja
Publication of JPS6416540U publication Critical patent/JPS6416540U/ja
Application granted granted Critical
Publication of JPH068428Y2 publication Critical patent/JPH068428Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP1987111062U 1987-07-20 1987-07-20 移送装置付クリーンベンチ Expired - Lifetime JPH068428Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987111062U JPH068428Y2 (ja) 1987-07-20 1987-07-20 移送装置付クリーンベンチ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987111062U JPH068428Y2 (ja) 1987-07-20 1987-07-20 移送装置付クリーンベンチ

Publications (2)

Publication Number Publication Date
JPS6416540U true JPS6416540U (ru) 1989-01-27
JPH068428Y2 JPH068428Y2 (ja) 1994-03-02

Family

ID=31348788

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987111062U Expired - Lifetime JPH068428Y2 (ja) 1987-07-20 1987-07-20 移送装置付クリーンベンチ

Country Status (1)

Country Link
JP (1) JPH068428Y2 (ru)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61123351U (ru) * 1985-01-16 1986-08-04
JPS61150094U (ru) * 1985-03-08 1986-09-17

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61123351U (ru) * 1985-01-16 1986-08-04
JPS61150094U (ru) * 1985-03-08 1986-09-17

Also Published As

Publication number Publication date
JPH068428Y2 (ja) 1994-03-02

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