JPS6416540U - - Google Patents
Info
- Publication number
- JPS6416540U JPS6416540U JP11106287U JP11106287U JPS6416540U JP S6416540 U JPS6416540 U JP S6416540U JP 11106287 U JP11106287 U JP 11106287U JP 11106287 U JP11106287 U JP 11106287U JP S6416540 U JPS6416540 U JP S6416540U
- Authority
- JP
- Japan
- Prior art keywords
- clean bench
- transfer device
- dustproof cover
- slit
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987111062U JPH068428Y2 (ja) | 1987-07-20 | 1987-07-20 | 移送装置付クリーンベンチ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987111062U JPH068428Y2 (ja) | 1987-07-20 | 1987-07-20 | 移送装置付クリーンベンチ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6416540U true JPS6416540U (en, 2012) | 1989-01-27 |
| JPH068428Y2 JPH068428Y2 (ja) | 1994-03-02 |
Family
ID=31348788
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987111062U Expired - Lifetime JPH068428Y2 (ja) | 1987-07-20 | 1987-07-20 | 移送装置付クリーンベンチ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH068428Y2 (en, 2012) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61123351U (en, 2012) * | 1985-01-16 | 1986-08-04 | ||
| JPS61150094U (en, 2012) * | 1985-03-08 | 1986-09-17 |
-
1987
- 1987-07-20 JP JP1987111062U patent/JPH068428Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61123351U (en, 2012) * | 1985-01-16 | 1986-08-04 | ||
| JPS61150094U (en, 2012) * | 1985-03-08 | 1986-09-17 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH068428Y2 (ja) | 1994-03-02 |