JPS6416311U - - Google Patents
Info
- Publication number
- JPS6416311U JPS6416311U JP11005787U JP11005787U JPS6416311U JP S6416311 U JPS6416311 U JP S6416311U JP 11005787 U JP11005787 U JP 11005787U JP 11005787 U JP11005787 U JP 11005787U JP S6416311 U JPS6416311 U JP S6416311U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafer suction
- suction chuck
- slicing machine
- blade
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 4
- 238000007664 blowing Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 239000007921 spray Substances 0.000 description 2
Landscapes
- Feeding Of Workpieces (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11005787U JPS6416311U (lm) | 1987-07-20 | 1987-07-20 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11005787U JPS6416311U (lm) | 1987-07-20 | 1987-07-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6416311U true JPS6416311U (lm) | 1989-01-26 |
Family
ID=31346870
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11005787U Pending JPS6416311U (lm) | 1987-07-20 | 1987-07-20 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6416311U (lm) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06166021A (ja) * | 1992-11-27 | 1994-06-14 | Shin Etsu Handotai Co Ltd | 内周刃式切断装置 |
-
1987
- 1987-07-20 JP JP11005787U patent/JPS6416311U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06166021A (ja) * | 1992-11-27 | 1994-06-14 | Shin Etsu Handotai Co Ltd | 内周刃式切断装置 |