JPS6416260U - - Google Patents
Info
- Publication number
- JPS6416260U JPS6416260U JP1987111118U JP11111887U JPS6416260U JP S6416260 U JPS6416260 U JP S6416260U JP 1987111118 U JP1987111118 U JP 1987111118U JP 11111887 U JP11111887 U JP 11111887U JP S6416260 U JPS6416260 U JP S6416260U
- Authority
- JP
- Japan
- Prior art keywords
- pressing
- plate
- turntable
- outer periphery
- pressing device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000007246 mechanism Effects 0.000 claims description 5
- 238000005498 polishing Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987111118U JPH0440848Y2 (https=) | 1987-07-20 | 1987-07-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987111118U JPH0440848Y2 (https=) | 1987-07-20 | 1987-07-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6416260U true JPS6416260U (https=) | 1989-01-26 |
| JPH0440848Y2 JPH0440848Y2 (https=) | 1992-09-25 |
Family
ID=31348886
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987111118U Expired JPH0440848Y2 (https=) | 1987-07-20 | 1987-07-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0440848Y2 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01135464A (ja) * | 1987-11-16 | 1989-05-29 | Mitsubishi Metal Corp | 研磨装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57194874A (en) * | 1981-05-27 | 1982-11-30 | Hitachi Ltd | Lapping device |
| JPS63150156A (ja) * | 1986-12-16 | 1988-06-22 | Naoetsu Denshi Kogyo Kk | ウエハ−研摩装置 |
-
1987
- 1987-07-20 JP JP1987111118U patent/JPH0440848Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57194874A (en) * | 1981-05-27 | 1982-11-30 | Hitachi Ltd | Lapping device |
| JPS63150156A (ja) * | 1986-12-16 | 1988-06-22 | Naoetsu Denshi Kogyo Kk | ウエハ−研摩装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01135464A (ja) * | 1987-11-16 | 1989-05-29 | Mitsubishi Metal Corp | 研磨装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0440848Y2 (https=) | 1992-09-25 |