JPS6416157U - - Google Patents
Info
- Publication number
- JPS6416157U JPS6416157U JP10970987U JP10970987U JPS6416157U JP S6416157 U JPS6416157 U JP S6416157U JP 10970987 U JP10970987 U JP 10970987U JP 10970987 U JP10970987 U JP 10970987U JP S6416157 U JPS6416157 U JP S6416157U
- Authority
- JP
- Japan
- Prior art keywords
- fixed
- stator
- rotor
- motor
- rotating part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007769 metal material Substances 0.000 claims 1
Landscapes
- Motor Or Generator Frames (AREA)
- Manufacture Of Motors, Generators (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10970987U JPS6416157U (fr) | 1987-07-17 | 1987-07-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10970987U JPS6416157U (fr) | 1987-07-17 | 1987-07-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6416157U true JPS6416157U (fr) | 1989-01-26 |
Family
ID=31346202
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10970987U Pending JPS6416157U (fr) | 1987-07-17 | 1987-07-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6416157U (fr) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002534282A (ja) * | 1998-12-30 | 2002-10-15 | ブルックス オートメーション インコーポレイテッド | 共通回転軸を有する複数アームを持つ基板搬送装置 |
| JP2011205878A (ja) * | 2009-12-25 | 2011-10-13 | Canon Anelva Corp | 真空アクチュエータ及び基板搬送ロボット |
-
1987
- 1987-07-17 JP JP10970987U patent/JPS6416157U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002534282A (ja) * | 1998-12-30 | 2002-10-15 | ブルックス オートメーション インコーポレイテッド | 共通回転軸を有する複数アームを持つ基板搬送装置 |
| JP2011205878A (ja) * | 2009-12-25 | 2011-10-13 | Canon Anelva Corp | 真空アクチュエータ及び基板搬送ロボット |
| US8912697B2 (en) | 2009-12-25 | 2014-12-16 | Canon Anelva Corporation | Vacuum actuator including a stator forming a part of a vacuum partition wall |