JPS6416157U - - Google Patents
Info
- Publication number
- JPS6416157U JPS6416157U JP10970987U JP10970987U JPS6416157U JP S6416157 U JPS6416157 U JP S6416157U JP 10970987 U JP10970987 U JP 10970987U JP 10970987 U JP10970987 U JP 10970987U JP S6416157 U JPS6416157 U JP S6416157U
- Authority
- JP
- Japan
- Prior art keywords
- fixed
- stator
- rotor
- motor
- rotating part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007769 metal material Substances 0.000 claims 1
Landscapes
- Manufacture Of Motors, Generators (AREA)
- Motor Or Generator Frames (AREA)
Description
第１図〜第３図は、この考案の一実施例による
真空用キヤンドモートルを示し、第１図はキヤン
ドモートルの断面側面図、第２図はモートルと組
合された真空機器の真空配管図、第３図はキヤン
部分の拡大断面側面図、第４図〜第６図は、従来
の真空用キヤンドモートルを示し、第４図はキヤ
ンドモートルの断面側面図、第５図はモートルと
組合された真空機器の真空配管図、第６図はキヤ
ン部分の拡大断面側面図である。
図において、１はフレーム、２はステータ、１
２はロータ、１３はキヤン、１４は真空機器、１
７は真空ポンプである。なお、図中同一符号は同
一、または相当部分を示す。
Figures 1 to 3 show a vacuum can motor according to an embodiment of this invention, Figure 1 is a sectional side view of the can motor, and Figure 2 is a vacuum piping of vacuum equipment combined with the motor. Figure 3 is an enlarged sectional side view of the can part, Figures 4 to 6 show a conventional vacuum can motor, Figure 4 is a sectional side view of the can motor, and Figure 5 is the motor. FIG. 6 is an enlarged sectional side view of the can part. In the figure, 1 is a frame, 2 is a stator, 1
2 is the rotor, 13 is the can, 14 is the vacuum equipment, 1
7 is a vacuum pump. Note that the same reference numerals in the figures indicate the same or corresponding parts.
Claims (1)
ータと、回転自在に支承される回転軸に固着され
たロータと、筒状の金属材よりなり、上記ステー
タとロータとを分離して固定部と回転部とを形成
するキヤンとを備え、上記固定部と回転部とが同
時に真空引きされてなることを特徴とする真空用
キヤンドモートル。 The stator is housed and fixed in the inner diameter of a cylindrical frame, the rotor is fixed to a rotary shaft that is rotatably supported, and is made of a cylindrical metal material.The stator and rotor are separated to form a fixed part. 1. A can motor for vacuum use, comprising a can forming a rotating part, and the fixed part and the rotating part are evacuated at the same time.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10970987U JPS6416157U (en) | 1987-07-17 | 1987-07-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10970987U JPS6416157U (en) | 1987-07-17 | 1987-07-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6416157U true JPS6416157U (en) | 1989-01-26 |
Family
ID=31346202
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10970987U Pending JPS6416157U (en) | 1987-07-17 | 1987-07-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6416157U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002534282A (en) * | 1998-12-30 | 2002-10-15 | ブルックス オートメーション インコーポレイテッド | Substrate transfer device with multiple arms having a common rotation axis |
| JP2011205878A (en) * | 2009-12-25 | 2011-10-13 | Canon Anelva Corp | Vacuum actuator and substrate transport robot |
-
1987
- 1987-07-17 JP JP10970987U patent/JPS6416157U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002534282A (en) * | 1998-12-30 | 2002-10-15 | ブルックス オートメーション インコーポレイテッド | Substrate transfer device with multiple arms having a common rotation axis |
| JP2011205878A (en) * | 2009-12-25 | 2011-10-13 | Canon Anelva Corp | Vacuum actuator and substrate transport robot |
| US8912697B2 (en) | 2009-12-25 | 2014-12-16 | Canon Anelva Corporation | Vacuum actuator including a stator forming a part of a vacuum partition wall |