JPS6415936U - - Google Patents

Info

Publication number
JPS6415936U
JPS6415936U JP10628287U JP10628287U JPS6415936U JP S6415936 U JPS6415936 U JP S6415936U JP 10628287 U JP10628287 U JP 10628287U JP 10628287 U JP10628287 U JP 10628287U JP S6415936 U JPS6415936 U JP S6415936U
Authority
JP
Japan
Prior art keywords
gas
flow rate
monitoring device
set value
detected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10628287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10628287U priority Critical patent/JPS6415936U/ja
Publication of JPS6415936U publication Critical patent/JPS6415936U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Examining Or Testing Airtightness (AREA)
JP10628287U 1987-07-13 1987-07-13 Pending JPS6415936U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10628287U JPS6415936U (enExample) 1987-07-13 1987-07-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10628287U JPS6415936U (enExample) 1987-07-13 1987-07-13

Publications (1)

Publication Number Publication Date
JPS6415936U true JPS6415936U (enExample) 1989-01-26

Family

ID=31339646

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10628287U Pending JPS6415936U (enExample) 1987-07-13 1987-07-13

Country Status (1)

Country Link
JP (1) JPS6415936U (enExample)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60115825A (ja) * 1983-07-29 1985-06-22 パナメトリクス・インコ−ポレイテツド フレアガスの平均分子量決定装置
JPS60164100A (ja) * 1984-02-06 1985-08-27 Nec Corp ガス供給システム

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60115825A (ja) * 1983-07-29 1985-06-22 パナメトリクス・インコ−ポレイテツド フレアガスの平均分子量決定装置
JPS60164100A (ja) * 1984-02-06 1985-08-27 Nec Corp ガス供給システム

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