JPS6415806U - - Google Patents

Info

Publication number
JPS6415806U
JPS6415806U JP10859187U JP10859187U JPS6415806U JP S6415806 U JPS6415806 U JP S6415806U JP 10859187 U JP10859187 U JP 10859187U JP 10859187 U JP10859187 U JP 10859187U JP S6415806 U JPS6415806 U JP S6415806U
Authority
JP
Japan
Prior art keywords
valve
pilot
valve member
output
port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10859187U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0425523Y2 (me
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10859187U priority Critical patent/JPH0425523Y2/ja
Publication of JPS6415806U publication Critical patent/JPS6415806U/ja
Application granted granted Critical
Publication of JPH0425523Y2 publication Critical patent/JPH0425523Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Servomotors (AREA)
JP10859187U 1987-07-15 1987-07-15 Expired JPH0425523Y2 (me)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10859187U JPH0425523Y2 (me) 1987-07-15 1987-07-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10859187U JPH0425523Y2 (me) 1987-07-15 1987-07-15

Publications (2)

Publication Number Publication Date
JPS6415806U true JPS6415806U (me) 1989-01-26
JPH0425523Y2 JPH0425523Y2 (me) 1992-06-18

Family

ID=31344073

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10859187U Expired JPH0425523Y2 (me) 1987-07-15 1987-07-15

Country Status (1)

Country Link
JP (1) JPH0425523Y2 (me)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001074162A (ja) * 1999-09-01 2001-03-23 Ebara Corp 流体制御弁及びフィルタ付きプレート

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001074162A (ja) * 1999-09-01 2001-03-23 Ebara Corp 流体制御弁及びフィルタ付きプレート

Also Published As

Publication number Publication date
JPH0425523Y2 (me) 1992-06-18

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