JPS6415806U - - Google Patents

Info

Publication number
JPS6415806U
JPS6415806U JP10859187U JP10859187U JPS6415806U JP S6415806 U JPS6415806 U JP S6415806U JP 10859187 U JP10859187 U JP 10859187U JP 10859187 U JP10859187 U JP 10859187U JP S6415806 U JPS6415806 U JP S6415806U
Authority
JP
Japan
Prior art keywords
valve
pilot
valve member
output
port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10859187U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0425523Y2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10859187U priority Critical patent/JPH0425523Y2/ja
Publication of JPS6415806U publication Critical patent/JPS6415806U/ja
Application granted granted Critical
Publication of JPH0425523Y2 publication Critical patent/JPH0425523Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Servomotors (AREA)
JP10859187U 1987-07-15 1987-07-15 Expired JPH0425523Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10859187U JPH0425523Y2 (https=) 1987-07-15 1987-07-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10859187U JPH0425523Y2 (https=) 1987-07-15 1987-07-15

Publications (2)

Publication Number Publication Date
JPS6415806U true JPS6415806U (https=) 1989-01-26
JPH0425523Y2 JPH0425523Y2 (https=) 1992-06-18

Family

ID=31344073

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10859187U Expired JPH0425523Y2 (https=) 1987-07-15 1987-07-15

Country Status (1)

Country Link
JP (1) JPH0425523Y2 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001074162A (ja) * 1999-09-01 2001-03-23 Ebara Corp 流体制御弁及びフィルタ付きプレート

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001074162A (ja) * 1999-09-01 2001-03-23 Ebara Corp 流体制御弁及びフィルタ付きプレート

Also Published As

Publication number Publication date
JPH0425523Y2 (https=) 1992-06-18

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