JPS6415421U - - Google Patents
Info
- Publication number
- JPS6415421U JPS6415421U JP11079187U JP11079187U JPS6415421U JP S6415421 U JPS6415421 U JP S6415421U JP 11079187 U JP11079187 U JP 11079187U JP 11079187 U JP11079187 U JP 11079187U JP S6415421 U JPS6415421 U JP S6415421U
- Authority
- JP
- Japan
- Prior art keywords
- quartz substrate
- acoustic wave
- wave device
- surface acoustic
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 230000008878 coupling Effects 0.000 claims description 3
- 238000010168 coupling process Methods 0.000 claims description 3
- 238000005859 coupling reaction Methods 0.000 claims description 3
- 239000010453 quartz Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 238000010897 surface acoustic wave method Methods 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11079187U JPS6415421U (en:Method) | 1987-07-20 | 1987-07-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11079187U JPS6415421U (en:Method) | 1987-07-20 | 1987-07-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6415421U true JPS6415421U (en:Method) | 1989-01-26 |
Family
ID=31348270
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11079187U Pending JPS6415421U (en:Method) | 1987-07-20 | 1987-07-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6415421U (en:Method) |
-
1987
- 1987-07-20 JP JP11079187U patent/JPS6415421U/ja active Pending