JPS6414853A - Transfer device for sample and the like in charged particle beam device - Google Patents

Transfer device for sample and the like in charged particle beam device

Info

Publication number
JPS6414853A
JPS6414853A JP62170430A JP17043087A JPS6414853A JP S6414853 A JPS6414853 A JP S6414853A JP 62170430 A JP62170430 A JP 62170430A JP 17043087 A JP17043087 A JP 17043087A JP S6414853 A JPS6414853 A JP S6414853A
Authority
JP
Japan
Prior art keywords
motor
current
threaded rod
micro
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62170430A
Other languages
Japanese (ja)
Inventor
Yoshihiro Hirata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP62170430A priority Critical patent/JPS6414853A/en
Publication of JPS6414853A publication Critical patent/JPS6414853A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To eliminate an error in position detection due to the play of a power transmission means by supplying micro-current for the elimination of said play for the predetermined time prior to feeding drive current to a motor and interrupting output to a rotary encoder. CONSTITUTION:A timer circuit 14 connects a switch S3 to a contact point (a) and turns off a switch 54, thereby breaking a connection between the output of a rotary encoder 8 and a position detecting circuit 9 based on start signal. Positive or negative voltage supplied from a power supply 15 for generating idle torque is fed to a motor drive circuit 12 via switches S2 and s3. A circuit 12 supplies micro-current to a motor 7 for the normal and reverse rotation thereof, and this motor 7 generates idle torque corresponding to the micro- current. The idle torque is transmitted to a threaded rod 4 via a ball joint 6 and a threaded rod rotation axis 5, thereby eliminating a mechanical play appearing at an area up to a slidable board 3 screwed to the threaded rod 4.
JP62170430A 1987-07-08 1987-07-08 Transfer device for sample and the like in charged particle beam device Pending JPS6414853A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62170430A JPS6414853A (en) 1987-07-08 1987-07-08 Transfer device for sample and the like in charged particle beam device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62170430A JPS6414853A (en) 1987-07-08 1987-07-08 Transfer device for sample and the like in charged particle beam device

Publications (1)

Publication Number Publication Date
JPS6414853A true JPS6414853A (en) 1989-01-19

Family

ID=15904770

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62170430A Pending JPS6414853A (en) 1987-07-08 1987-07-08 Transfer device for sample and the like in charged particle beam device

Country Status (1)

Country Link
JP (1) JPS6414853A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1309356C (en) * 2002-05-23 2007-04-11 尤妮佳股份有限公司 Disposable wearing article
JP2016121438A (en) * 2014-12-24 2016-07-07 戸田建設株式会社 Automated construction method of steel-frame work, and structure
US20210302894A1 (en) * 2020-03-31 2021-09-30 Ricoh Company, Ltd. Image forming apparatus and method of correcting image positional deviation

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4927193U (en) * 1972-06-11 1974-03-08
JPS5590042A (en) * 1978-12-28 1980-07-08 Jeol Ltd View field changer for electronic microscope, etc.
JPS5710008B2 (en) * 1977-03-07 1982-02-24

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4927193U (en) * 1972-06-11 1974-03-08
JPS5710008B2 (en) * 1977-03-07 1982-02-24
JPS5590042A (en) * 1978-12-28 1980-07-08 Jeol Ltd View field changer for electronic microscope, etc.

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1309356C (en) * 2002-05-23 2007-04-11 尤妮佳股份有限公司 Disposable wearing article
JP2016121438A (en) * 2014-12-24 2016-07-07 戸田建設株式会社 Automated construction method of steel-frame work, and structure
US20210302894A1 (en) * 2020-03-31 2021-09-30 Ricoh Company, Ltd. Image forming apparatus and method of correcting image positional deviation
US12061433B2 (en) * 2020-03-31 2024-08-13 Ricoh Company, Ltd. Image forming apparatus and method of correcting image positional deviation

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