JPS6414159U - - Google Patents
Info
- Publication number
- JPS6414159U JPS6414159U JP11025587U JP11025587U JPS6414159U JP S6414159 U JPS6414159 U JP S6414159U JP 11025587 U JP11025587 U JP 11025587U JP 11025587 U JP11025587 U JP 11025587U JP S6414159 U JPS6414159 U JP S6414159U
- Authority
- JP
- Japan
- Prior art keywords
- ion plating
- plating apparatus
- vacuum chamber
- evaporation
- disposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001704 evaporation Methods 0.000 claims description 12
- 238000007733 ion plating Methods 0.000 claims description 12
- 230000008020 evaporation Effects 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims 2
- 230000005284 excitation Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11025587U JPH0523566Y2 (https=) | 1987-07-17 | 1987-07-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11025587U JPH0523566Y2 (https=) | 1987-07-17 | 1987-07-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6414159U true JPS6414159U (https=) | 1989-01-25 |
| JPH0523566Y2 JPH0523566Y2 (https=) | 1993-06-16 |
Family
ID=31347248
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11025587U Expired - Lifetime JPH0523566Y2 (https=) | 1987-07-17 | 1987-07-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0523566Y2 (https=) |
-
1987
- 1987-07-17 JP JP11025587U patent/JPH0523566Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0523566Y2 (https=) | 1993-06-16 |
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