JPS6414158U - - Google Patents
Info
- Publication number
- JPS6414158U JPS6414158U JP10876487U JP10876487U JPS6414158U JP S6414158 U JPS6414158 U JP S6414158U JP 10876487 U JP10876487 U JP 10876487U JP 10876487 U JP10876487 U JP 10876487U JP S6414158 U JPS6414158 U JP S6414158U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- groove
- target
- stirring
- forming apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000003756 stirring Methods 0.000 claims description 7
- 230000003750 conditioning effect Effects 0.000 claims description 3
- 238000005553 drilling Methods 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10876487U JPH0527482Y2 (https=) | 1987-07-14 | 1987-07-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10876487U JPH0527482Y2 (https=) | 1987-07-14 | 1987-07-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6414158U true JPS6414158U (https=) | 1989-01-25 |
| JPH0527482Y2 JPH0527482Y2 (https=) | 1993-07-13 |
Family
ID=31344405
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10876487U Expired - Lifetime JPH0527482Y2 (https=) | 1987-07-14 | 1987-07-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0527482Y2 (https=) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009057603A (ja) * | 2007-08-31 | 2009-03-19 | Toshiba Corp | 微粒子担持方法及び担持装置 |
| JP2009057602A (ja) * | 2007-08-31 | 2009-03-19 | Toshiba Corp | 微粒子担持方法及び微粒子担持装置 |
| JP2012057198A (ja) * | 2010-09-07 | 2012-03-22 | Ulvac-Riko Inc | 微粒子形成装置およびその方法 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102393250B1 (ko) | 2020-08-27 | 2022-05-12 | (주)엔케이이노베이션 | 방호복용 휴대용 냉각시스템 |
-
1987
- 1987-07-14 JP JP10876487U patent/JPH0527482Y2/ja not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009057603A (ja) * | 2007-08-31 | 2009-03-19 | Toshiba Corp | 微粒子担持方法及び担持装置 |
| JP2009057602A (ja) * | 2007-08-31 | 2009-03-19 | Toshiba Corp | 微粒子担持方法及び微粒子担持装置 |
| JP2012057198A (ja) * | 2010-09-07 | 2012-03-22 | Ulvac-Riko Inc | 微粒子形成装置およびその方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0527482Y2 (https=) | 1993-07-13 |