JPS6414158U

JPS6414158U -

Info

Publication number: JPS6414158U
Application number: JP10876487U
Authority: JP
Priority date: 1987-07-14
Filing date: 1987-07-14
Publication date: 1989-01-25
Anticipated expiration: 2002-07-14
Also published as: JPH0527482Y2

Description

[Brief explanation of drawings]

第１図ａは本考案を２極直流スパツタリング法
に採用した一実施例の概略平面図であり、第１図
ｂは第１図ａのＡ―Ａ断面を示す。第２図ａは、
試料撹拌装置３０、試料ならし装置４０および試
料ホルダ１０の一部を示す平面図であり、第２図
ｂ、第２図ｃ、第２図ｄ、第２図ｅは第２図ａの
Ｂ―Ｂ断面、Ｃ―Ｃ断面、Ｄ―Ｄ断面、Ｅ―Ｅ断
面をそれぞれ示す。１……試料、１０……試料ホルダ、１２……溝
、２０……ターゲツト、３０……試料撹拌装置、
３１……撹拌片、４０……試料ならし装置、４１
……ならし片、５０……チヤンバ。 FIG. 1a is a schematic plan view of an embodiment in which the present invention is applied to a two-pole DC sputtering method, and FIG. 1b shows a cross section taken along the line AA in FIG. 1a. Figure 2 a is
2 is a plan view showing part of a sample stirring device 30, a sample conditioning device 40, and a sample holder 10, and FIG. 2b, FIG. 2c, FIG. 2d, and FIG. 2e are B in FIG. 2a. -B cross section, C-C cross section, D-D cross section, and E-E cross section are shown, respectively. 1... Sample, 10... Sample holder, 12... Groove, 20... Target, 30... Sample stirring device,
31... Stirring piece, 40... Sample conditioning device, 41
...Training piece, 50...Chiyamba.

Claims

[Scope of utility model registration request]

A vacuum film forming apparatus equipped with a sample holder, a sample holder rotation device, a target, a sample stirring device, and a sample conditioning device, wherein the top surface of the sample holder is provided with an annular groove into which a powdered or particulate sample is placed. While drilling, the target is positioned above the groove, and a stirring piece of the sample stirring device that stirs the sample and a leveling piece of the sample leveling device that flattens the sample are placed in the groove. A vacuum film forming apparatus characterized by being located inside.