JPS6414157U - - Google Patents

Info

Publication number
JPS6414157U
JPS6414157U JP10852287U JP10852287U JPS6414157U JP S6414157 U JPS6414157 U JP S6414157U JP 10852287 U JP10852287 U JP 10852287U JP 10852287 U JP10852287 U JP 10852287U JP S6414157 U JPS6414157 U JP S6414157U
Authority
JP
Japan
Prior art keywords
base
leg
arc discharge
discharge type
holding table
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10852287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10852287U priority Critical patent/JPS6414157U/ja
Publication of JPS6414157U publication Critical patent/JPS6414157U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP10852287U 1987-07-14 1987-07-14 Pending JPS6414157U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10852287U JPS6414157U (enrdf_load_stackoverflow) 1987-07-14 1987-07-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10852287U JPS6414157U (enrdf_load_stackoverflow) 1987-07-14 1987-07-14

Publications (1)

Publication Number Publication Date
JPS6414157U true JPS6414157U (enrdf_load_stackoverflow) 1989-01-25

Family

ID=31343936

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10852287U Pending JPS6414157U (enrdf_load_stackoverflow) 1987-07-14 1987-07-14

Country Status (1)

Country Link
JP (1) JPS6414157U (enrdf_load_stackoverflow)

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