JPS6413662U - - Google Patents
Info
- Publication number
- JPS6413662U JPS6413662U JP10870287U JP10870287U JPS6413662U JP S6413662 U JPS6413662 U JP S6413662U JP 10870287 U JP10870287 U JP 10870287U JP 10870287 U JP10870287 U JP 10870287U JP S6413662 U JPS6413662 U JP S6413662U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- irradiated
- irradiation
- electron beam
- vacuum chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 claims 2
- 230000001678 irradiating effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987108702U JPH0622917Y2 (ja) | 1987-07-14 | 1987-07-14 | 電子線照射装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987108702U JPH0622917Y2 (ja) | 1987-07-14 | 1987-07-14 | 電子線照射装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6413662U true JPS6413662U (ru) | 1989-01-24 |
| JPH0622917Y2 JPH0622917Y2 (ja) | 1994-06-15 |
Family
ID=31344284
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987108702U Expired - Lifetime JPH0622917Y2 (ja) | 1987-07-14 | 1987-07-14 | 電子線照射装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0622917Y2 (ru) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50318A (ru) * | 1973-05-08 | 1975-01-06 |
-
1987
- 1987-07-14 JP JP1987108702U patent/JPH0622917Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50318A (ru) * | 1973-05-08 | 1975-01-06 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0622917Y2 (ja) | 1994-06-15 |