JPS6413435A - Particulate measuring instrument - Google Patents

Particulate measuring instrument

Info

Publication number
JPS6413435A
JPS6413435A JP62169077A JP16907787A JPS6413435A JP S6413435 A JPS6413435 A JP S6413435A JP 62169077 A JP62169077 A JP 62169077A JP 16907787 A JP16907787 A JP 16907787A JP S6413435 A JPS6413435 A JP S6413435A
Authority
JP
Japan
Prior art keywords
stray light
detection
cell
kinds
removing means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62169077A
Other languages
Japanese (ja)
Inventor
Ryozo Okada
Senji Shinpo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP62169077A priority Critical patent/JPS6413435A/en
Publication of JPS6413435A publication Critical patent/JPS6413435A/en
Pending legal-status Critical Current

Links

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  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

PURPOSE:To detect particulates of smaller size efficiently at a large flow rate by arranging >=2 kinds of stray light removing means in a detection cell. CONSTITUTION:Slit 50 and 52 are arranged in the detection optical system path of a detection cell 40 where a photodetector 30 for detecting scattered light is arranged, a corrugated wall surface part 60 is formed partially, and a reflection preventive coating 70 is arranged at least at part of it. In this case, >=2 kinds of stray light removing means are used in combination in the cell 40. Consequently, light beams (b) and (c) among stray light components shown by a dotted line are removed, but it is difficult to remove a stray light component (a) which is incident directly on the detector 30 from a point R. Therefore, even if stray light is generated, it can be removed as much as possible, so the S/N ratio of a detection signal can be improved by reducing a noise level.
JP62169077A 1987-07-07 1987-07-07 Particulate measuring instrument Pending JPS6413435A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62169077A JPS6413435A (en) 1987-07-07 1987-07-07 Particulate measuring instrument

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62169077A JPS6413435A (en) 1987-07-07 1987-07-07 Particulate measuring instrument

Publications (1)

Publication Number Publication Date
JPS6413435A true JPS6413435A (en) 1989-01-18

Family

ID=15879897

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62169077A Pending JPS6413435A (en) 1987-07-07 1987-07-07 Particulate measuring instrument

Country Status (1)

Country Link
JP (1) JPS6413435A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020020706A (en) * 2018-08-02 2020-02-06 株式会社島津製作所 Light scattering detection device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020020706A (en) * 2018-08-02 2020-02-06 株式会社島津製作所 Light scattering detection device

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