JPS6413125U - - Google Patents
Info
- Publication number
- JPS6413125U JPS6413125U JP10781587U JP10781587U JPS6413125U JP S6413125 U JPS6413125 U JP S6413125U JP 10781587 U JP10781587 U JP 10781587U JP 10781587 U JP10781587 U JP 10781587U JP S6413125 U JPS6413125 U JP S6413125U
- Authority
- JP
- Japan
- Prior art keywords
- wiring pattern
- laminated
- semiconductor device
- covered
- protective film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 2
- 229910052581 Si3N4 Inorganic materials 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 230000001681 protective effect Effects 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
Landscapes
- Formation Of Insulating Films (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10781587U JPS6413125U (uk) | 1987-07-14 | 1987-07-14 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10781587U JPS6413125U (uk) | 1987-07-14 | 1987-07-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6413125U true JPS6413125U (uk) | 1989-01-24 |
Family
ID=31342564
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10781587U Pending JPS6413125U (uk) | 1987-07-14 | 1987-07-14 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6413125U (uk) |
-
1987
- 1987-07-14 JP JP10781587U patent/JPS6413125U/ja active Pending