JPS6413124U - - Google Patents

Info

Publication number
JPS6413124U
JPS6413124U JP10617487U JP10617487U JPS6413124U JP S6413124 U JPS6413124 U JP S6413124U JP 10617487 U JP10617487 U JP 10617487U JP 10617487 U JP10617487 U JP 10617487U JP S6413124 U JPS6413124 U JP S6413124U
Authority
JP
Japan
Prior art keywords
cleaned
processing gas
cleaning
cleaning device
component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10617487U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10617487U priority Critical patent/JPS6413124U/ja
Publication of JPS6413124U publication Critical patent/JPS6413124U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP10617487U 1987-07-10 1987-07-10 Pending JPS6413124U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10617487U JPS6413124U (enExample) 1987-07-10 1987-07-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10617487U JPS6413124U (enExample) 1987-07-10 1987-07-10

Publications (1)

Publication Number Publication Date
JPS6413124U true JPS6413124U (enExample) 1989-01-24

Family

ID=31339447

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10617487U Pending JPS6413124U (enExample) 1987-07-10 1987-07-10

Country Status (1)

Country Link
JP (1) JPS6413124U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020113621A (ja) * 2019-01-10 2020-07-27 東京エレクトロン株式会社 基板処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020113621A (ja) * 2019-01-10 2020-07-27 東京エレクトロン株式会社 基板処理装置

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