JPS6412876A - Position detector for electrostatic actuator - Google Patents

Position detector for electrostatic actuator

Info

Publication number
JPS6412876A
JPS6412876A JP16561787A JP16561787A JPS6412876A JP S6412876 A JPS6412876 A JP S6412876A JP 16561787 A JP16561787 A JP 16561787A JP 16561787 A JP16561787 A JP 16561787A JP S6412876 A JPS6412876 A JP S6412876A
Authority
JP
Japan
Prior art keywords
electrode
cylindrical electrode
electrostatic capacity
fixed electrodes
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16561787A
Other languages
English (en)
Inventor
Katsuhiro Horiguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP16561787A priority Critical patent/JPS6412876A/ja
Publication of JPS6412876A publication Critical patent/JPS6412876A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Control Of Position Or Direction (AREA)
JP16561787A 1987-07-02 1987-07-02 Position detector for electrostatic actuator Pending JPS6412876A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16561787A JPS6412876A (en) 1987-07-02 1987-07-02 Position detector for electrostatic actuator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16561787A JPS6412876A (en) 1987-07-02 1987-07-02 Position detector for electrostatic actuator

Publications (1)

Publication Number Publication Date
JPS6412876A true JPS6412876A (en) 1989-01-17

Family

ID=15815768

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16561787A Pending JPS6412876A (en) 1987-07-02 1987-07-02 Position detector for electrostatic actuator

Country Status (1)

Country Link
JP (1) JPS6412876A (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5237234A (en) * 1988-10-13 1993-08-17 At&T Bell Laboratories Harmonic electrostatic motor
US5281358A (en) * 1990-10-24 1994-01-25 Kao Corporation Deinking agent
JP2008125229A (ja) * 2006-11-10 2008-05-29 Olympus Corp 慣性駆動アクチュエータ
JP2008131681A (ja) * 2006-11-16 2008-06-05 Pentax Corp 移動装置
JPWO2014147670A1 (ja) * 2013-03-22 2017-02-16 富士通株式会社 ダブルエンドフォワードコンバータ及び電源装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5237234A (en) * 1988-10-13 1993-08-17 At&T Bell Laboratories Harmonic electrostatic motor
US5281358A (en) * 1990-10-24 1994-01-25 Kao Corporation Deinking agent
JP2008125229A (ja) * 2006-11-10 2008-05-29 Olympus Corp 慣性駆動アクチュエータ
JP2008131681A (ja) * 2006-11-16 2008-06-05 Pentax Corp 移動装置
JPWO2014147670A1 (ja) * 2013-03-22 2017-02-16 富士通株式会社 ダブルエンドフォワードコンバータ及び電源装置

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