JPS6412764U - - Google Patents
Info
- Publication number
- JPS6412764U JPS6412764U JP10524887U JP10524887U JPS6412764U JP S6412764 U JPS6412764 U JP S6412764U JP 10524887 U JP10524887 U JP 10524887U JP 10524887 U JP10524887 U JP 10524887U JP S6412764 U JPS6412764 U JP S6412764U
- Authority
- JP
- Japan
- Prior art keywords
- tape
- workpiece
- pressurizing
- piezo actuator
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims 3
- 238000001514 detection method Methods 0.000 claims 2
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10524887U JPS6412764U (OSRAM) | 1987-07-10 | 1987-07-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10524887U JPS6412764U (OSRAM) | 1987-07-10 | 1987-07-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6412764U true JPS6412764U (OSRAM) | 1989-01-23 |
Family
ID=31337691
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10524887U Pending JPS6412764U (OSRAM) | 1987-07-10 | 1987-07-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6412764U (OSRAM) |
-
1987
- 1987-07-10 JP JP10524887U patent/JPS6412764U/ja active Pending