JPS6412764U - - Google Patents
Info
- Publication number
- JPS6412764U JPS6412764U JP10524887U JP10524887U JPS6412764U JP S6412764 U JPS6412764 U JP S6412764U JP 10524887 U JP10524887 U JP 10524887U JP 10524887 U JP10524887 U JP 10524887U JP S6412764 U JPS6412764 U JP S6412764U
- Authority
- JP
- Japan
- Prior art keywords
- tape
- workpiece
- pressurizing
- piezo actuator
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims 3
- 238000001514 detection method Methods 0.000 claims 2
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Description
第１図は、本考案による加圧力制御装置の一例
を示すブロツク線図である。
１……ワーク、５……テープ、６……ピエゾア
クチユエータ、７……歪計、８……加圧ヘツド、
１０……設定器、１２……制御器。
FIG. 1 is a block diagram showing an example of a pressurizing force control device according to the present invention. 1... Work, 5... Tape, 6... Piezo actuator, 7... Strain meter, 8... Pressure head,
10...setting device, 12...controller.
Claims (1)
クの加工面に押付けて加工するテープポリシング
装置における加圧力制御装置であつて、加圧ヘツ
ドをワークに向けて移動させるピエゾアクチユエ
ータと、加圧ヘツドとピエゾアクチユエータの間
に配置された圧力検出手段と、ワークに対するテ
ープの加圧力の基準値を設定する設定器と、この
設定器の出力と前記圧力検出手段の出力を比較し
、その差を前記ピエゾアクチユエータにフイード
バツクする制御器とを設けたことを特徴とするテ
ープポリシング装置における加圧力制御装置。 A pressurizing force control device for a tape polishing device that processes a traveling polishing tape by pressing it against the processing surface of a workpiece using a pressure head, and includes a piezo actuator that moves the pressurizing head toward the workpiece, and a pressurizing head. A pressure detection means disposed between the piezo actuator and a setting device that sets a reference value of the pressure force of the tape against the workpiece, and the output of this setting device and the output of the pressure detection means are compared and the difference is calculated. 1. A pressurizing force control device for a tape polishing apparatus, comprising: a controller that provides feedback to the piezo actuator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10524887U JPS6412764U (en) | 1987-07-10 | 1987-07-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10524887U JPS6412764U (en) | 1987-07-10 | 1987-07-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6412764U true JPS6412764U (en) | 1989-01-23 |
Family
ID=31337691
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10524887U Pending JPS6412764U (en) | 1987-07-10 | 1987-07-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6412764U (en) |
-
1987
- 1987-07-10 JP JP10524887U patent/JPS6412764U/ja active Pending
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