JPS641225A - Device for manufacturing semiconductor - Google Patents

Device for manufacturing semiconductor

Info

Publication number
JPS641225A
JPS641225A JP15678387A JP15678387A JPS641225A JP S641225 A JPS641225 A JP S641225A JP 15678387 A JP15678387 A JP 15678387A JP 15678387 A JP15678387 A JP 15678387A JP S641225 A JPS641225 A JP S641225A
Authority
JP
Japan
Prior art keywords
rings
ball
ring
bearing
hardness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15678387A
Other languages
Japanese (ja)
Other versions
JPH011225A (en
JPH0533814B2 (en
Inventor
Hiroshi Ueno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koyo Seiko Co Ltd
Original Assignee
Koyo Seiko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koyo Seiko Co Ltd filed Critical Koyo Seiko Co Ltd
Priority to JP15678387A priority Critical patent/JPS641225A/en
Publication of JPH011225A publication Critical patent/JPH011225A/en
Publication of JPS641225A publication Critical patent/JPS641225A/en
Publication of JPH0533814B2 publication Critical patent/JPH0533814B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Abstract

PURPOSE: To use a semiconductor even in a high temperature casing without any problem, to eliminate the contact of metals and to obtain a device having excellent wear resistance and low resistance by forming a bearing of a race ring formed of metal and carbon, and rolls having hardness harder than that of the ring.
CONSTITUTION: A bearing 6 is formed of an outer ring 7, an inner ring 8 as a race ring, balls 11, 11,... as rolls disposed at a predetermined interval along a circumferential direction between the rings 8 and 7, and a retainer 12 for holding the balls 11, 11,... The rings 8, 7 are formed of metal, such as stainless steel, while the ball 1 is formed of baked carbon to have a self-lubrication. The retainer 12 is of rivet calked and made of SUS304. Vickers' hardness Hv of the rings 7, 8 is 700, the Hv of the ball 11 is 1700 as sufficient strengths. Since the ball 11 has higher hardness than that of the rings 8, 7, the bearing can endure against high load.
COPYRIGHT: (C)1989,JPO&Japio
JP15678387A 1987-06-24 1987-06-24 Device for manufacturing semiconductor Granted JPS641225A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15678387A JPS641225A (en) 1987-06-24 1987-06-24 Device for manufacturing semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15678387A JPS641225A (en) 1987-06-24 1987-06-24 Device for manufacturing semiconductor

Publications (3)

Publication Number Publication Date
JPH011225A JPH011225A (en) 1989-01-05
JPS641225A true JPS641225A (en) 1989-01-05
JPH0533814B2 JPH0533814B2 (en) 1993-05-20

Family

ID=15635213

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15678387A Granted JPS641225A (en) 1987-06-24 1987-06-24 Device for manufacturing semiconductor

Country Status (1)

Country Link
JP (1) JPS641225A (en)

Also Published As

Publication number Publication date
JPH0533814B2 (en) 1993-05-20

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Legal Events

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