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Sanyo Electric Co Ltd
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Sanyo Electric Co Ltd
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Application filed by Sanyo Electric Co LtdfiledCriticalSanyo Electric Co Ltd
Priority to JP16471487ApriorityCriticalpatent/JPS6412085A/en
Publication of JPS6412085ApublicationCriticalpatent/JPS6412085A/en
Compressors, Vaccum Pumps And Other Relevant Systems
(AREA)
Abstract
PURPOSE:To shorten the attaching time of an adsorption material by winding the adsorption material made of cloth-like formed fibrous activated carbon around the outer surface of a cryopanel and fixing the outer circumference of the adsorption material with an attaching piece. CONSTITUTION:A cryopump 1 has a condenser 7, a radiation shield 8, and a cryopanel 10. An adsorption material 14 is formed by weaving cellulose-based, fibrous activated carbon into the form of a cloth. The adsorption material 14 is wound around a cylindrical portion 11 of the cryopanel 10 and fixed by attaching a ring-like attaching piece 15. As a result, the attaching time of the adsorption material is shortened by the time otherwise required for the solidification of adhesive for the adsorption material to improve productivity.