JPS6411562U - - Google Patents

Info

Publication number
JPS6411562U
JPS6411562U JP10381487U JP10381487U JPS6411562U JP S6411562 U JPS6411562 U JP S6411562U JP 10381487 U JP10381487 U JP 10381487U JP 10381487 U JP10381487 U JP 10381487U JP S6411562 U JPS6411562 U JP S6411562U
Authority
JP
Japan
Prior art keywords
gas
window
laser
peripheral wall
plenum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10381487U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10381487U priority Critical patent/JPS6411562U/ja
Publication of JPS6411562U publication Critical patent/JPS6411562U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Lasers (AREA)
JP10381487U 1987-07-08 1987-07-08 Pending JPS6411562U (lt)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10381487U JPS6411562U (lt) 1987-07-08 1987-07-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10381487U JPS6411562U (lt) 1987-07-08 1987-07-08

Publications (1)

Publication Number Publication Date
JPS6411562U true JPS6411562U (lt) 1989-01-20

Family

ID=31334974

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10381487U Pending JPS6411562U (lt) 1987-07-08 1987-07-08

Country Status (1)

Country Link
JP (1) JPS6411562U (lt)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06291390A (ja) * 1993-04-02 1994-10-18 Hitachi Ltd ガスレーザ装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06291390A (ja) * 1993-04-02 1994-10-18 Hitachi Ltd ガスレーザ装置

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