JPS6411381U - - Google Patents

Info

Publication number
JPS6411381U
JPS6411381U JP10495187U JP10495187U JPS6411381U JP S6411381 U JPS6411381 U JP S6411381U JP 10495187 U JP10495187 U JP 10495187U JP 10495187 U JP10495187 U JP 10495187U JP S6411381 U JPS6411381 U JP S6411381U
Authority
JP
Japan
Prior art keywords
control
actuator
introduction chamber
control valve
movable plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10495187U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0355835Y2 (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10495187U priority Critical patent/JPH0355835Y2/ja
Publication of JPS6411381U publication Critical patent/JPS6411381U/ja
Application granted granted Critical
Publication of JPH0355835Y2 publication Critical patent/JPH0355835Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Rotary Pumps (AREA)
JP10495187U 1987-07-07 1987-07-07 Expired JPH0355835Y2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10495187U JPH0355835Y2 (fr) 1987-07-07 1987-07-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10495187U JPH0355835Y2 (fr) 1987-07-07 1987-07-07

Publications (2)

Publication Number Publication Date
JPS6411381U true JPS6411381U (fr) 1989-01-20
JPH0355835Y2 JPH0355835Y2 (fr) 1991-12-12

Family

ID=31337132

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10495187U Expired JPH0355835Y2 (fr) 1987-07-07 1987-07-07

Country Status (1)

Country Link
JP (1) JPH0355835Y2 (fr)

Also Published As

Publication number Publication date
JPH0355835Y2 (fr) 1991-12-12

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