JPS6410666U - - Google Patents
Info
- Publication number
- JPS6410666U JPS6410666U JP10610987U JP10610987U JPS6410666U JP S6410666 U JPS6410666 U JP S6410666U JP 10610987 U JP10610987 U JP 10610987U JP 10610987 U JP10610987 U JP 10610987U JP S6410666 U JPS6410666 U JP S6410666U
- Authority
- JP
- Japan
- Prior art keywords
- weight
- flexible portion
- viscous fluid
- hole
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 claims 2
- 238000001514 detection method Methods 0.000 claims 1
- 230000001133 acceleration Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
Landscapes
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10610987U JPS6410666U (enExample) | 1987-07-10 | 1987-07-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10610987U JPS6410666U (enExample) | 1987-07-10 | 1987-07-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6410666U true JPS6410666U (enExample) | 1989-01-20 |
Family
ID=31339325
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10610987U Pending JPS6410666U (enExample) | 1987-07-10 | 1987-07-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6410666U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004286652A (ja) * | 2003-03-24 | 2004-10-14 | Denso Corp | 加速度センサ |
| US7538363B2 (en) | 2006-05-29 | 2009-05-26 | Panasonic Corporation | Solid-state imaging device and method for fabricating the same |
-
1987
- 1987-07-10 JP JP10610987U patent/JPS6410666U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004286652A (ja) * | 2003-03-24 | 2004-10-14 | Denso Corp | 加速度センサ |
| US7538363B2 (en) | 2006-05-29 | 2009-05-26 | Panasonic Corporation | Solid-state imaging device and method for fabricating the same |